Different thick-film methods in printing of one-electrode semiconductor gas sensors

doi:10.1016/S0925-4005(97)80013-5

Sensors and Actuators B: Chemical

Volume 34, Issues 1–3, August 1996, Pages 401-406

https://doi.org/10.1016/S0925-4005(97)80013-5 Get rights and content

Abstract

Different thick-film printing techniques have been used for the fabrication of one-electrode semiconductor gas sensors in the form of thick films on insulating alumina substrate. In a typical one-electrode sensor construction, a thin platinum wire (diameter 20 μm) spiral is embedded inside a sintered oxide semiconductor button. The platinum wire spiral is replaced by a platinum thick-film resistor in our prototype sensor, and the oxide semiconductor is screen printed over the platinum resistor. Both screen printing and gravure off-set printing (pad printing) were used for the printing of platinum thick-film resistors. Tin dioxide, an n-type semiconductor, was used as the sensing (shunting)_thick-film layer over the platinum resistor, and diferent amounts of either silver or antimony were used as additives in SnO₂. H₂S and CO at different concentrations in synthetic air were used to test the response properties of two different sensor types with, respectively, screen-printed and pad-printed platinum thick-film resistors.

References (10)

S.N. Malchenko et al.
One-electrode semiconductor sensors for detection of toxic and explosive gases in air
Sensors and Actuators B
(1992)
S. Leppävuori et al.
A novel thick-film technique, gravure offset printing, for the realization of fine-line sensor structures
Sensors and Actuators A
(1994)
V. Lantto et al.
H₂S monitoring as an air pollutant with silver doped SnO₂ thin-film sensors
Sensors and Actuators B
(1991)
A. Harkoma-Mattila et al.
Sensitivity and selectivity of doped SnO₂ thick-film sensors to H₂S in the constant- and pulsed-temperature modes
Sensors and Actuators B
(1992)
Y.M. Cross et al.
An x-ray photoelectron spectroscopy study of the surface composition of tin and antimony mixed metal oxide catalysts
Journal of Catalysis
(1979)

There are more references available in the full text version of this article.

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Different thick-film methods in printing of one-electrode semiconductor gas sensors

Abstract

Sensors and Actuators B

Sensors and Actuators A

Sensors and Actuators B

Sensors and Actuators B

Journal of Catalysis