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Sputtering yield measurements

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Sputtering by Particle Bombardment I

Part of the book series: Topics in Applied Physics ((TAP,volume 47))

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Authors
  1. Hans Henrik Andersen
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  2. Helge L. Bay
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Rainer Behrisch

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Andersen, H.H., Bay, H.L. (1981). Sputtering yield measurements. In: Behrisch, R. (eds) Sputtering by Particle Bombardment I. Topics in Applied Physics, vol 47. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3540105212_9

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