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Charged and excited states of sputtered atoms

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Sputtering by Particle Bombardment III

Part of the book series: Topics in Applied Physics ((TAP,volume 64))

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Yu, M.L. (1991). Charged and excited states of sputtered atoms. In: Behrisch, R., Wittmaack, K. (eds) Sputtering by Particle Bombardment III. Topics in Applied Physics, vol 64. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3540534288_17

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