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Backscattered Electron Imaging

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Scanning Electron Microscopy, X-Ray Microanalysis, and Analytical Electron Microscopy

Abstract

This laboratory will demonstrate the influence of the electron detector and its characteristics upon the final appearance of the SEM image. The experiments are principally centered around the use of the backscattered electron signal to obtain topographic and compositional information. More details may be found in SEMXM, Section 4.4.

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Authors and Affiliations

  1. Lehigh University, Bethlehem, Pennsylvania, USA

    Charles E. Lyman, Joseph I. Goldstein & David B. Williams

  2. Sandia National Laboratories, Albuquerque, New Mexico, USA

    Alton D. Romig Jr.

  3. University of Cambridge, Cambridge, England

    Patrick Echlin

  4. University of Tennessee, Knoxville, Tennessee, USA

    David C. Joy

  5. National Institute of Standards and Technology, Gaithersburg, Maryland, USA

    Dale E. Newbury & Charles E. Fiori

  6. California Institute of Technology, Pasadena, California, USA

    John T. Armstrong

  7. GE Corporate Research and Development, Schenectady, New York, USA

    Eric Lifshin

  8. The University of Connecticut Health Center, Farmington, Connecticut, USA

    Klaus-Ruediger Peters

Authors
  1. Charles E. Lyman
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  2. Joseph I. Goldstein
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  3. Alton D. Romig Jr.
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  4. Patrick Echlin
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  5. David C. Joy
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  6. Dale E. Newbury
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  7. David B. Williams
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  8. John T. Armstrong
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  9. Charles E. Fiori
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  10. Eric Lifshin
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  11. Klaus-Ruediger Peters
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© 1990 Plenum Press, New York

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Lyman, C.E. et al. (1990). Backscattered Electron Imaging. In: Scanning Electron Microscopy, X-Ray Microanalysis, and Analytical Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0635-1_8

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  • DOI: https://doi.org/10.1007/978-1-4613-0635-1_8

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-306-43591-1

  • Online ISBN: 978-1-4613-0635-1

  • eBook Packages: Springer Book Archive

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