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Optimization of Controllable Pulsed LASER Deposition Parameters for the Fabrication of Lead Free Ba(Zr0.15Ti0.85)O3 Thin Films

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Microactuators, Microsensors and Micromechanisms (MAMM 2022)

Part of the book series: Mechanisms and Machine Science ((Mechan. Machine Science,volume 126))

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Abstract

Owing to the superior energy and power storage properties, the Zr doped BaTiO3 (BZT) material system is reportedly used in numerous applications. In this work, the optimal process parameters viz., substrate temperature, oxygen gas pressure, laser fluence and target-substrate distance for deposition of lead-free thin films using pulsed laser deposition (PLD) system were evaluated. The deposition of BZT thin films were carried out based on design of experiments by adopting the Taguchi method. The thickness and dielectric properties of deposited thin films were analyzed to assess the influence of each parameter on the growth of thin films using analysis of variance (ANOVA) method. Optimal process conditions based on grey relational analysis were evaluated. The phase and morphology analysis on BZT films indicate possibility of domain engineering by choosing appropriate process variables. BZT thin films deposited at optimal process conditions resulted in superior properties comparable to properties of single crystal of the same material system.

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References

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Acknowledgements

The authors acknowledge the financial support from the Defence Research and Development Organization, Ministry of Defence, New Delhi for carrying out the present work. Also, the authors would like to thank the Director of Defence Metallurgical Research laboratory (DMRL) for permitting publication of this work.

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Authors and Affiliations

  1. Ceramics and Composites Group, Defence Metallurgical Research Laboratory, Kanchanbagh, Hyderabad, 500058, India

    M. L. V. Mahesh, V. V. Bhanuprasad & A. R. James

  2. Department of Physics, Indian Institute of Technology, Sangareddy, Kandi, Telangana, 502285, India

    M. L. V. Mahesh & Prem Pal

Authors
  1. M. L. V. Mahesh
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  2. Prem Pal
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  3. V. V. Bhanuprasad
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  4. A. R. James
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Corresponding author

Correspondence to M. L. V. Mahesh .

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Editors and Affiliations

  1. Department of Mechanical and Aerospace Engineering, Indian Institute of Technology Hyderabad, Sangareddy, Telangana, India

    Ashok Kumar Pandey

  2. Department of Physics, Indian Institute of Technology Hyderabad, Sangareddy, Telangana, India

    Prem Pal

  3. Central Manufacturing Technology Institute, Bengaluru, Karnataka, India

    Nagahanumaiah

  4. Department of Mechanical Engineering, Technische Universität Ilmenau, Ilmenau, Germany

    Lena Zentner

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Mahesh, M.L.V., Pal, P., Bhanuprasad, V.V., James, A.R. (2023). Optimization of Controllable Pulsed LASER Deposition Parameters for the Fabrication of Lead Free Ba(Zr0.15Ti0.85)O3 Thin Films. In: Pandey, A.K., Pal, P., Nagahanumaiah, Zentner, L. (eds) Microactuators, Microsensors and Micromechanisms. MAMM 2022. Mechanisms and Machine Science, vol 126. Springer, Cham. https://doi.org/10.1007/978-3-031-20353-4_31

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  • DOI: https://doi.org/10.1007/978-3-031-20353-4_31

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-031-20352-7

  • Online ISBN: 978-3-031-20353-4

  • eBook Packages: EngineeringEngineering (R0)

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