Overview
- First book which comprises all aspects of CSD of functional oxide thin films
- Includes supplementary material: sn.pub/extras
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Table of contents (29 chapters)
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Analytical Methods
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Deposition Techniques
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Processing and Crystallization
Keywords
About this book
This is the first text to cover all aspects of solution processed functional oxide thin-films. Chemical Solution Deposition (CSD) comprises all solution based thin- film deposition techniques, which involve chemical reactions of precursors during the formation of the oxide films, i. e. sol-gel type routes, metallo-organic decomposition routes, hybrid routes, etc. While the development of sol-gel type processes for optical coatings on glass by silicon dioxide and titanium dioxide dates from the mid-20th century, the first CSD derived electronic oxide thin films, such as lead zirconate titanate, were prepared in the 1980’s. Since then CSD has emerged as a highly flexible and cost-effective technique for the fabrication of a very wide variety of functional oxide thin films. Application areas include, for example, integrated dielectric capacitors, ferroelectric random access memories, pyroelectric infrared detectors, piezoelectric micro-electromechanical systems, antireflective coatings, optical filters, conducting-, transparent conducting-, and superconducting layers, luminescent coatings, gas sensors, thin film solid-oxide fuel cells, and photoelectrocatalytic solar cells. In the appendix detailed “cooking recipes” for selected material systems are offered.
Editors and Affiliations
Bibliographic Information
Book Title: Chemical Solution Deposition of Functional Oxide Thin Films
Editors: Theodor Schneller, Rainer Waser, Marija Kosec, David Payne
DOI: https://doi.org/10.1007/978-3-211-99311-8
Publisher: Springer Vienna
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag Wien 2013
Hardcover ISBN: 978-3-211-99310-1Published: 04 February 2014
Softcover ISBN: 978-3-7091-1915-0Published: 23 August 2016
eBook ISBN: 978-3-211-99311-8Published: 24 January 2014
Edition Number: 1
Number of Pages: XVII, 796
Number of Illustrations: 257 b/w illustrations, 133 illustrations in colour
Topics: Surfaces and Interfaces, Thin Films, Physical Chemistry, Industrial and Production Engineering, Tribology, Corrosion and Coatings