Skip to main content
SpringerLink
Log in

Vacancy Defects Detected by Positron Annihilation

  • Chapter
Silicon Carbide

Part of the book series: Advanced Texts in Physics ((ADTP))

Abstract

Point defects in SiC is important in connection with the technological concerns such as ion implantation, crystal growth and radiation tolerance. Among different types of point defects, vacancy defects have been frequently argued in the past studies on irradiated SiC using deep level transient spectroscopy (DLTS), electron spin resonance (ESR), photoluminescence (PL), etc. Although these conventional approaches have a capability to discriminate different defect species, even indirect for the determination of the type of defects. Consequently, the origins of important energy levels in SiC have not yet been fully understood.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 259.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 329.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 329.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. R. Krause-Rehberg, H.S. Leipner: Positron Annihilation in Semiconductors, Springer Series in Solid-State Sciences, Vol. vn127 (Springer, Berlin, 1998)

    Google Scholar 

  2. P. Asoka-Kumar, J.K.G. Lynn, D.O. Welch: J. Appl. Phys. 76, 4935 (1994)

    Article  CAS  Google Scholar 

  3. M.J. Puska, R.M. Nieminen: Rev. Mod. Phys. 66, 841 (1994)

    Article  CAS  Google Scholar 

  4. G. Brauer, W. Anward, E.-M. Nicht, J. Kuriplach, M. Šob, N. Wagner, P.G. Coleman, M.J. Puska, T. Korhonen: Phys. Rev. B 54, 2512 (1996)

    Article  CAS  Google Scholar 

  5. T. Staab, L.M. Torpo, M.J. Puska, R.M. Nieminen: Mater. Sci. For. 353–356, 533 (2001)

    Google Scholar 

  6. A. Kawasuso, H. Itoh, S. Okada, H. Okumura: J. Appl. Phys. 80, 5639 (1996)

    Article  CAS  Google Scholar 

  7. A.A. Rempel, H.-E. Schaefer: Appl. Phys. A 61, 51 (1995)

    Article  Google Scholar 

  8. S. Dannefaer, D. Craigen, D. Kerr: Phys. Rev. B 51, 1928 (1995)

    Article  CAS  Google Scholar 

  9. A. Polity, S. Huth, M. Lausmann: Phys. Rev. B 59, 10603 (1999)

    Article  CAS  Google Scholar 

  10. G. Brauer, W. Anward, P.G. Poleman, A.P. Knight, Y. Pacaud, W. Skorupa, J. Störmer, P. Willutzki: Phys. Rev. B 54, 3084 (1996)

    Article  CAS  Google Scholar 

  11. R. Krause-Rehberg, H.S. Leipner: Appl. Phys. A 64, 457 (1997)

    CAS  Google Scholar 

  12. P. Asoka-Kumar, M. Alatalo, V.J. Ghosh, A.C. Kruseman, B. Nielsen, K.G. Lynn: Phys. Rev. Lett. 77, 2097 (1996)

    Article  CAS  Google Scholar 

  13. H. Itoh, A. Kawasuso, T. Ohshima, M. Toshikawa, I. Nashiyama, S. Tanigawa, S. Misawa, H. Okumura, S. Yoshida: Phys. Stat. Sol. (a) 162, 173 (1997)

    Article  CAS  Google Scholar 

  14. H. Itoh, N. Hayakawa, I. Nashiyama, E. Sakuma: J. Appl. Phys. 66, 4529 (1989)

    Article  CAS  Google Scholar 

  15. H. Itoh, M. Yoshikawa, I. Nashiyama, S. Misawa, H. Okumura, S. Yoshida: Inst. Phys. Conf. Ser. 137, 255 (1993)

    Google Scholar 

  16. A. Kawasuso, H. Itoh, N. Morishita, M. Yoshikawa, T. Ohshima, I. Nashiyama, S. Okada, H. Okumura, S. Yoshida: Appl. Phys. A 67, 209 (1998)

    Article  CAS  Google Scholar 

  17. A. Kawasuso et al.: submitted to Phys. Rev. B

    Google Scholar 

  18. A. Kawasuso, F. Redmann, R. Krause-Rehberg, M. Yoshikawa, K. Kojima, H. Itoh: Phys. Stat. Sol. (b) 223, R8–10 (2001)

    Article  CAS  Google Scholar 

  19. H. Itoh, M. Yoshikawa, L. Wei, S. Tanigawa, I. Nashiyama, S. Misawa, H. Okumura, S. Yoshida: Mat. Res. Soc. Symp. Proc. 262, 331 (1992)

    Article  CAS  Google Scholar 

  20. A. Zywietz, J. Furthmüller, F. Bechstedt: Phys. Rev. B 61, 13655 (2000)

    Article  CAS  Google Scholar 

  21. A. Zywietz, J. Furthmüller, F. Bechstedt: Phys. Rev. B 59, 15166 (1999)

    Article  CAS  Google Scholar 

  22. L. Torpo, R.M. Nieminen, K.E. Laasonen, S. Pöykkö: Appl. Phys. Lett. 74, 221 (1999)

    Article  CAS  Google Scholar 

  23. L. Torpo, M. Marlo, T.E.M. Staab, R.M. Nieminen: J. Phys. Condens Matter 13, 6203 (2001)

    Article  CAS  Google Scholar 

  24. A. Mattausch, M. Bockstedte, O. Pankratov: Mater. Sci. For. 353–356, 323 (2001)

    Google Scholar 

  25. L.A. de S. Balona, J.H.N. Loubser: J. Phys. C 3, 2344 (1970)

    Article  CAS  Google Scholar 

  26. M. Bockstedte, O. Pankratov: Mater. Sci. For. 338–342, 949 (2000)

    Google Scholar 

  27. E. Rauls, T. Linger, Z. Hajnal, S. Greulich-Weber, T. Frauenheim, J.M. Spaeth: Phys. Stat. Sol. (b) 217, R1 (2000)

    Article  CAS  Google Scholar 

  28. T. Linger, S. Greulich-Weber, J.M. Spaeth, U. Gerstmann, E. Rauls, H. Overhof: Physica, B 308–310, 625 (2001)

    Article  Google Scholar 

  29. M.J. Puska, C. Corbel: Phys. Rev. B 38, 9874 (1988)

    Article  CAS  Google Scholar 

  30. H. Itoh, M. Yoshikawa, I. Nashiyama, H. Okumura, S. Misawa, S. Yoshida: J. Appl. Phys. 77, 837 (1995)

    Article  CAS  Google Scholar 

  31. D.S. Billington, J.H. Crawford, Jr.: Radiation Damage in Solids (Princeton University Press, Princeton, NJ, 1961)

    Google Scholar 

  32. R. Devanathan, W.J. Weber and F. Gao: J. Appl. Phys. 90, 2303 (2001)

    Article  CAS  Google Scholar 

  33. R. Devanathan, W.J. Weber: J. Nucl. Mater. 278, 258 (2000)

    Article  CAS  Google Scholar 

  34. A.L. Barry, B. Lehmann, D. Fritsch, D. Bräung: IEEE Trans. Nucl. Sci. 30, 1111 (1991)

    Article  Google Scholar 

  35. A. Kawasuso, H. Itoh, N. Morishita, M. Yoshikawa, T. Ohshima, I. Nashiyama, S. Okada, H. Okumura, S. Yoshida: Appl. Phys. A 67, 209 (1998)

    Article  CAS  Google Scholar 

  36. A. Kawasuso, H. Itoh, D. Cha, S. Okada: Mater. Sci. For. 264–268, 611 (1998)

    Google Scholar 

  37. A.I. Girka, V.A. Kuleshin, A.D. Mokrushin, E.N. Mokhov, S.V. Svirida, A.V. Shishkin: Sov. Phys. Semicond. 23, 1337 (1989)

    Google Scholar 

  38. D. Dannefaer: Appl. Phys. A 61, 59 (1995)

    Article  Google Scholar 

  39. Y. Bodakov, E.N. Mokhov: Inst. Phys. Conf. Ser. 137, 197(1993)

    Google Scholar 

  40. D. Cha, H. Itoh, N. Morishita, A. Kawasuso, T. Ohshima, Y. Watanabe, J. Ko, K. Lee, I. Nashiyama: Mater. Sci. For. 2640–268, 615 (1998)

    Google Scholar 

  41. N.T. Son, P.N. Hai, E. Janzen: Phys. Rev. B 63, 20120 (2001)

    Article  Google Scholar 

  42. A.A. Rempel, K. Blaurock, K.J. Reichle, W. Sprengel, H.E. Schaefer: Mater. Sci. For. 389–393, 485 (2002)

    Google Scholar 

  43. S. Arpiainen, K. Saarinen, P Hautojärvi: Phys. Rev. B 66, 75206 (2002)

    Article  Google Scholar 

  44. C.C. Ling, C.D. Beling, S. Fung: Phys. Rev. B 62, 8016 (2000)

    Article  CAS  Google Scholar 

  45. M. Bockstedte, M. Heid, A. Mattausch, O. Pankratov: Mater. Sci. For. 389–393, 471 (2002)

    Google Scholar 

  46. A. Kawasuso, F. Redmann, R. Krause-Rehberg, T. Frank, M. Weidner, G. Pensl, P. Sperr, H. Itoh: J. Appl. Phys. 90, 3377 (2001)

    Article  CAS  Google Scholar 

  47. A. Kawasuso, F. Redmann, R. Krause-Rehberg, M. Weidner, T. Frank, G. Pensl, P. Sperr, W. Triftshäuser, H. Itoh: Appl. Phys. Lett. 79, 3950 (2001)

    Article  CAS  Google Scholar 

  48. A. Kawasuso, M. Weidner, F. Redmann, T. Frank, R. Krause-Rehberg, G. Pensl, P. Sperr, W. Triftshäuser, H. Itoh: Mater. Sci. For. 389–393, 489 (2002)

    Google Scholar 

  49. A. Kawasuso, M. Weidner, F. Redmann, T. Frank, P. Sperr, R. Krause-Rehberg, W. Triftshäuser, G. Pensl: Physica B 308–310 (2001)

    Google Scholar 

  50. A. van Veen, H. Schut, M. Clement, J.M.M. de Nijs, A. Kruseman, M.R. Ijpma: Appl. Surf. Sci. 85, 216 (1995)

    Article  Google Scholar 

  51. E. Rauls, T.E.M. Staab, Z. Hajnal, Th. Frauenheim: Physica B 308–310, 645 (2001)

    Article  Google Scholar 

  52. A. Kawasuso, M. Yoshikawa, M. Maekawa, H. Itoh, T. Chiba, F. Redmann, R. Krause-Rehberg, M. Weidner, T. Frank, G. Pensl: Mater. Sci. For., to be published

    Google Scholar 

  53. C. Hemmingsson, N.T. Son, O. Kordina, E. Janzén, J.L. Lindström: J. Appl. Phys. 84, 704 (1998)

    Article  CAS  Google Scholar 

  54. M. Gong, S. Fung, C.D. Beling, Z. You: J. Appl. Phys. 85, 7604 (1999)

    Article  CAS  Google Scholar 

  55. M.O. Aboelfotoh, J.P. Doyle: Phys. Reb. B 59, 10823 (1999)

    Article  CAS  Google Scholar 

  56. V.S. Ballandovich: Sov. Phys. Semicond. 33, 1188 (1999)

    CAS  Google Scholar 

  57. V.S. Ballandovich, G.N. Violina: Cryst. Latt. Def. and Amorph. Mat. 13, 189 (1987)

    Google Scholar 

  58. M. Gong, S. Fung, C.D. Beling, Z. You: J. Appl. Phys. 85, 7120 (1999)

    Article  CAS  Google Scholar 

  59. H. Zhang, G. Pensl, A. Dörnen, S. Leibenzeder: Electrochem. Soc. Ext. Abstracts 89–2, 699 (1989)

    Google Scholar 

  60. H. Zhang, G. Pensl, P. Glasow, S. Leibenzeder: Electrochem. Soc. Ext. Abstracts 89–2, 714 (1989)

    Google Scholar 

  61. G.C. Rybliki: J. Appl. Phys. 78, 2996 (1995)

    Article  Google Scholar 

  62. A.A. Lebedev, A.I. Veinger, D.V. Davydov, V.V. Kozlovski, N.S. Savkina, A.M. Strel’chuk: J. Appl. Phys. 88, 6265 (2000)

    Article  CAS  Google Scholar 

  63. J.P. Doyle, M.O. Aboelfotoh, M.K. Linnarsson, B.G. Svensson, A. Schoner, N. Nordell, C. Harris, J.L. lindstrom, E. Janzen, C. Hemmingsson: Mat. Res. Soc. Symp. Proc. 423, 519 (1996)

    Article  CAS  Google Scholar 

  64. T. Dalibor, C. Peppermüller, G. Pensl, S. Sridhara, R.P. Devaty, W.J. Choyke, A. Itoh, T. Kimoto, H. Matsunami: Inst. Phys. Conf. Ser. 142, 517 (1996)

    CAS  Google Scholar 

  65. T. Dalibor, G. Pensl, H. Matsunami, T. Kimoto, W.J. Choyke, A. Schöner, N. Nordell: Phys. Stat. Sol. (a) 162, 199 (1997)

    Article  CAS  Google Scholar 

  66. T. Dalibor, G. Pensl, T. Kimoto, H. Matsunami, S. Sridhara, R.P. Devaty, W.J. Choyke: Diamond and Related Maerials, 6, 1333 (1997)

    Article  CAS  Google Scholar 

  67. C. Hemmingsson, N.T. Son, O. Kordina, J.P. B ergman, E. Janzen, J.L. Lindström, S. Savage, N. Nordell: J. Appl. Phys. 81, 6155 (1997)

    Article  CAS  Google Scholar 

  68. L. Storasta, F.H. Carlsson, S.G. Sridhara, J.P. Bergman, A. Henry, T. Egilsson, A. H allén, E. Janzen: Appl. Phys. Lett. 78, 46 (2001)

    Article  CAS  Google Scholar 

  69. L. Storasta, F.H. Carlsson, S.G. Sridhara, D. Åberg, J.P. B ergman, A. Hallén, E. Janzén: Mater. Sci. For. 353–356, 431 (2001)

    Google Scholar 

  70. V. Nagesh, J.W. Farmer, R.F. Davis, H.S. Kong: Radiat. Effects and Defects in Solids 112, 77 (1990)

    Article  CAS  Google Scholar 

  71. G. Pensl and W.J. Choyke: Physica B 185, 264 (1993)

    Article  CAS  Google Scholar 

  72. T. Frank, G. Pensl, S. Bai, R.P. Devaty, W.J. Choyke: Mater. Sci. For. 338–342, 753 (2000)

    Google Scholar 

  73. C. Hemmingsson, N.T. Son, E. Janzén: Appl. Phys. Lett. 74, 839 (1999)

    Article  CAS  Google Scholar 

  74. C. Hemmingsson, N.T. Son, A. Ellison, J. Zhang, E. Janzén: Phys. Rev. B 58, R10119 (1998)

    Article  CAS  Google Scholar 

  75. C. Hemmingsson, N.T. Son, O. Kordina, J.L. Lindström, A. Ellison, J. Zhang, E. Janzén: Semicond. Sci. Technol. 14, 251 (1999)

    Article  CAS  Google Scholar 

  76. M. Weidner, T. Frank, G. Pensl, A. Kawasuso, H. Itoh, R. Krause-Rehberg: Physica B 308–310, 633 (2001)

    Article  Google Scholar 

  77. T. Kimoto, S. N akazawa, K. Hashimoto, H. Matsunami: Appl. Phys. Lett. 79, 2761 (2001)

    Article  CAS  Google Scholar 

  78. K. Fujihira, T. Kimoto, H. Matsunami: Appl. Phys. Lett. 80, 1586 (2002)

    Article  CAS  Google Scholar 

  79. T. Kimoto, S. Nakazawa, K. Fujihira, T. Hirao, S. Nakamura, Y. Chen, K. Hashimoto, H. Matsunami: Mater. Sci. For. 389–393, 165 (2002)

    Google Scholar 

  80. I. Pintille, L. Pintille, K. Irmscher, B. Thomas: Appl. Phys. Lett. 81, 4841 (2002)

    Article  Google Scholar 

  81. H.J. von Bardeleben, J.L. Cantin, I. Vickridge, G. Battistig: Phys. Rev. B 62, 10123 (2000)

    Google Scholar 

  82. M. Okada, K. Atobe, M. Nakagawa, S. Kanazawa, I. Kanno, I. Kimura: Nucl. Inst. Meth. Phys. Res. B 166–167, 399 (2000)

    Article  Google Scholar 

  83. L. Patrick and W.J. Choyke: Phys. Rev. B 5, 3253 (1972)

    Article  Google Scholar 

  84. W.J. Choyke: Inst. Phys. Conf. Ser. 31, 58 (1977)

    Google Scholar 

  85. F.H.C. Carlsson, L. Storasta, B. Magnusson, J.P. Bergman, K. Sköld, E. Janzén: Mater. Sci. For. 353–356, 555 (2001)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Japan Atomic Energy, Research Institute, Watanuki, 1233, Takasaki, Gunma, 370-1292, Japan

    A. Kawasuso, M. Yoshikawa & H. Itoh

  2. Institute of Applied Physics, University of Erlangen-Nürnberg, Staudtstrasse 7 / A3, 91058, Erlangen, Germany

    M. Weidner, T. Frank & G. Pensl

  3. Martin-Luther-Universität, Halle-Wittenberg, Friedemann-Bach-Platz 6, 06108, Halle, Germany

    F. Redmann & R. Krause-Rehberg

  4. Universität der Bundeswehr München, 85577, Neubiberg, Germany

    P. Sperr, G. Kögel & W. Triftshäuser

Authors
  1. A. Kawasuso
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. Weidner
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. F. Redmann
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. T. Frank
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. P. Sperr
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. G. Kögel
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. M. Yoshikawa
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. H. Itoh
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. R. Krause-Rehberg
    View author publications

    You can also search for this author in PubMed Google Scholar

  10. W. Triftshäuser
    View author publications

    You can also search for this author in PubMed Google Scholar

  11. G. Pensl
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Department of Physics and Astronomy, University of Pittsburgh, Pittsburgh, PA, 15260, USA

    W. J. Choyke

  2. Department of Electronic Science and Engineering Yoshidahonmachi, Kyoto University, Sakyo, Kyoto, 606-8501, Japan

    H. Matsunami

  3. Institute of Applied Physics, University of Erlangen-Nürnberg, Staudtstrasse 7/A3, 91058, Erlangen, Germany

    G. Pensl

Rights and permissions

Reprints and permissions

Copyright information

© 2004 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Kawasuso, A. et al. (2004). Vacancy Defects Detected by Positron Annihilation. In: Choyke, W.J., Matsunami, H., Pensl, G. (eds) Silicon Carbide. Advanced Texts in Physics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-18870-1_23

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-18870-1_23

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-62333-2

  • Online ISBN: 978-3-642-18870-1

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation