Summary
We present a micromachined mirror array for use in adaptive optics. Piston motions of more than 6 µm as well as tip/tilt motions of 11 mrad (0.65°) are demonstrated. Single-crystal-silicon mirrors are assembled onto electrostatic parallel-plate actuators. The actuators lift off the substrate after microstructure release as a consequence of residual stresses in nickel-polysilicon bimorph flexures. The assembled mirrors provide fill factors of 95%. Peak-to-valley surface variations are smaller than 30 nm over a 464 µm-diameter (vertex-to-vertex) mirror segment.
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Helmbrecht, M.A., Srinivasan, U., Rembe, C., Howe, R.T., Muller, R.S. (2001). Micromirrors for Adaptive-Optics Arrays. In: Obermeier, E. (eds) Transducers ’01 Eurosensors XV. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-59497-7_297
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DOI: https://doi.org/10.1007/978-3-642-59497-7_297
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