Skip to main content
SpringerLink
Log in

Pulsed Laser Annealing of GaAs: A Comparison Between Calculation and Experiment

  • Conference paper
Laser Processing and Diagnostics

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 39))

Abstract

Results from a thermal melting model for pulsed laser annealing of GaAs are presented and compared with laser dissociation measurements made as a function of absorbed laser energy.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. J.F. Gibbons, L.D. Hess and T.W. Sigmon, eds., Proc. MRS Symp. on Laser and Electron-beam Solid Interactions and Material Processing (North-Holland, New York, 1981).

    Google Scholar 

  2. R.F. Wood and G.E. Giles, Phys. Rev. B 23 (1981).

    Google Scholar 

  3. R.F. Wood, J.R. Kirkpatrick and G.E. Giles, Phys. Rev. B23, 5555 (1981).

    Google Scholar 

  4. J.A. van Vechten, in Laser and Electron-beam Solid Interactions, edited by C.W. White and P.S. Peercy (Academic, New York, 1980), p. 53.

    Google Scholar 

  5. M.E.Thomson, G.I. Galvin, in Laser-Solid Interactions and Transient Thermal Processing of Materials, ed. by J. Narayan et al. (North Holland, New York 1983) Vol. 13, p. 57.

    Google Scholar 

  6. A. Aydinli, A. Compaan, H.W. Lo and M.C. Lee, Phys. Lett. 86A (1981) p. 199

    CAS  Google Scholar 

  7. A. Pospieszczyk and M. Abdel Harith, J. Appl. Phys. 54 (6) (1983).

    Google Scholar 

  8. A. Rose, J.T.A. Pollock, M.D. Scott, F.M. Adams, J.S. Williams and E.M. Lawson, in Ref. 5, p. 633.

    Google Scholar 

  9. D.O. Boerma, H. Hasper and K.G. Prasard, Phys. Lett. 92A, 253 (1983).

    Google Scholar 

  10. R.F. Wood, D.H. Lowndes and W.H. Christie, (ref. 1), p. 231

    Google Scholar 

  11. Z.L. Wang and F.W. Saris, Phys. Lett. 83A, 367 (1981).

    CAS  Google Scholar 

  12. J.T.A. Pollock and A. Rose, “Laser and electron-beam processing”, Boston MRS (1983). To be published.

    Google Scholar 

  13. A.K. Jain, V.N. Kulkarni and D.K. Sood, Appl. Phys. 25, 127 (1981).

    Article  CAS  Google Scholar 

  14. R.D. Richtmeyer and K.W. Morton, Difference Methods for Initial Value Problems, 2nd Ed. (Interscience, New York, 1967).

    Google Scholar 

  15. P.D. Maycock, Solid State Electron, 10, 161 (1967).

    Article  CAS  Google Scholar 

  16. “Selected Values of the Thermodynamic Properties of the Elements”, American Society for Metals (1976).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Division of Chemical Physics, Commonwealth Scientific and Industrial Research Organization, Lucas Heights Research Laboratories, PMB 7, Sutherland, NSW, 2232, Australia

    A. Rose

  2. Applied Physics Division, Australian Atomic Energy Commission Research Establishment, Lucas Heights Research Laboratories, PMB, Sutherland, NSW, 2232, Australia

    E. K. Rose

Authors
  1. A. Rose
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. E. K. Rose
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Institut für Angewandte Physik, Johannes-Kepler-Universität, A-4040, Linz, Austria

    Dieter Bäuerle

Rights and permissions

Reprints and permissions

Copyright information

© 1984 Springer-Verlag Berlin Heidelberg

About this paper

Cite this paper

Rose, A., Rose, E.K. (1984). Pulsed Laser Annealing of GaAs: A Comparison Between Calculation and Experiment. In: Bäuerle, D. (eds) Laser Processing and Diagnostics. Springer Series in Chemical Physics, vol 39. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82381-7_5

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-82381-7_5

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82383-1

  • Online ISBN: 978-3-642-82381-7

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation