Summary
The non-linearity of heterodyne interferometers is mainly influenced by the non-orthogonality and ellipticity of the linearly polarized partial beams of the laser and by the limited extinction capability of the polarizing beam splitters. The phase errors at the interferometer output can be detected by measuring the phase difference between the two orthogonal directions in the output beam. This arrangement can be used to check an interferometer set-up for causes of non-linearity and to eliminate them by adjustment, replacement etc. When the phases of the two orthogonal output signals are measured separately and compared with the reference signal, and when the arithmetical mean value is formed, except for a small residual error the phase value obtained is free from non-linearities.
supported by the Alexander von Humboldt-Stiftung, Bonn, F.R.G.
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© 1991 Springer-Verlag Berlin, Heidelberg
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Hou, W., Wilkening, G. (1991). Investigation and Compensation of the Non-linearity of Heterodyne Interferometers. In: Seyfried, P., Kunzmann, H., McKeown, P., Weck, M. (eds) Progress in Precision Engineering. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-84494-2_1
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DOI: https://doi.org/10.1007/978-3-642-84494-2_1
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