Overview
- Editors:
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A. Berg
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MESA Research Institute, University of Twente, The Netherlands
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P. Bergveld
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MESA Research Institute, University of Twente, The Netherlands
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Table of contents (40 papers)
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- Andreas Manz, Elisabeth Verpoorte, Daniel E. Raymond, Carlo S. Effenhauser, Norbert Burggraf, H. Michael Widmer
Pages 5-27
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- H. Sandmaier, R. Zengerle, A. Richter
Pages 71-72
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- Jan H. Fluitman, Albert van den Berg, Theo S. Lammerink
Pages 73-83
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- D. Jed Harrison, Karl Fluri, Zhongui Fan, Kurt Seiler
Pages 105-115
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- Luc Bousse, Richard McReynolds
Pages 127-138
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- M. Allen Northrup, Carlos Gonzalez, Stacy Lehew, Rob Hills
Pages 139-139
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- Jens Branebjerg, Birgit Fabius, Peter Gravesen
Pages 141-151
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- I. Lundström, A. Lloyd Spetz, H. Sundgren, F. Winquist
Pages 153-163
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- Shuichi Shoji, Masayoshi Esashi
Pages 165-179
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- Bart H. van der Schoot, Elisabeth M. J. Verpoorte, Sylvain Jeanneret, Andreas Manz, Nico F. de Rooij
Pages 181-190
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- Ph. Arquint, B. H. van der Schoot, N. F. de Rooij
Pages 191-194
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- N. Croce, M. C. Carrozza, P. Dario
Pages 195-198
About this book
The MESA Research Institute of the University of Twente was created in 1990 through the joining of the research unit Sensors and Actuators with the department of Microelectronics. The multidisciplinary institute, with participation from the faculties of Electrical Engineering, Applied Physics and Chemical Technology, was recently recognized as a Centre of Excellence by the Dutch Science Foundation. It is fully 2 equipped with modem Clean Room facilities (1000 m ) and a number of research laboratories. The objective of MESA is to perform research and development of systems in modem information technology, and on the units on which they are based: the microstructures that process and transduce signals. The institute gradually expanded during the past few years till some 125 persons in 1994. Given the wide variety of research subjects within MESA, it has been decided to start a MESA Monographs series, appearing on a more or less regular, yearly basis. In this way, after some time a good overview of research topics under investigation at MESA will be obtained. The first volume of this series coincides with the Proceedings of pTAS '94, the first Workshop on Micro Total Analysis Systems, held on November 21-22 at the University of Twente in Enschede, The Netherlands. IlTAS has recently been defined as the first strategic research orientation of MESA, aiming at synergetic collaboration between the different disciplines present in MESA.
Editors and Affiliations
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MESA Research Institute, University of Twente, The Netherlands
A. Berg,
P. Bergveld