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Soft Computing for Intelligent Systems pp 133–146Cite as

Design and Analysis of Thin Micro-Mechanical Suspended Dielectric RF-MEMS Switch for 5G and IoT Applications

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Part of the book series: Algorithms for Intelligent Systems ((AIS))

Abstract

5G systems provide a large mobile network capacity with higher video resolution, higher data rates as compared to 4G wireless network systems offered. Radio frequency-based Micro-Electro-Mechanical System (RF-MEMS)-based devices can enable various front end functions, non-reciprocity, filtering, radiation and equalization with small size, weight and better performance for IoT and 5G applications.. RF-MEMS based devices have widely grown over the last two decades due to their low power consumption, low loss and superior performances. RF-MEMS switch is mostly used for signal processing functions in microwave and RF circuits. In this paper, a switch is designed with a square plate of polysilicon with silicon nitride as dielectric. A DC voltage is applied to the design, which is greater than pull in voltage across the structure of switch. Penalty-based contact force is applied to the design, which makes the bridge comes in contact with dielectric. The structure showed spatial dependence on total displacement. The capacitance increased by a factor of 55 approximately.

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Author information

Authors and Affiliations

  1. Thapar Institute of Engineering and Technology, Patiala, India

    Bikramjit Sharma

  2. Chandigarh Group of Colleges, Landran, India

    Manvinder Sharma & Sumeet Goyal

  3. College of Engineering and Management, Punjabi University, Patiala, India

    Bhim Sain Singla

Authors
  1. Bikramjit Sharma
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  2. Manvinder Sharma
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  3. Bhim Sain Singla
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  4. Sumeet Goyal
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Corresponding author

Correspondence to Bikramjit Sharma .

Editor information

Editors and Affiliations

  1. Department of Electronics and Communication Engineering, Kurukshetra University, Kurukshetra, Haryana, India

    Nikhil Marriwala

  2. University Institute of Engineering and Technology (UIET), Kurukshetra University, Kurukshetra, Haryana, India

    C. C Tripathi

  3. Department of Electronics and Communication Engineering, Jaypee University of Information Technology, Waknaghat, Himachal Pradesh, India

    Shruti Jain

  4. Co-Founder of Dew Mobility, Santa Clara University, Santa Clara, CA, USA

    Shivakumar Mathapathi

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Sharma, B., Sharma, M., Singla, B.S., Goyal, S. (2021). Design and Analysis of Thin Micro-Mechanical Suspended Dielectric RF-MEMS Switch for 5G and IoT Applications. In: Marriwala, N., Tripathi, C.C., Jain, S., Mathapathi, S. (eds) Soft Computing for Intelligent Systems. Algorithms for Intelligent Systems. Springer, Singapore. https://doi.org/10.1007/978-981-16-1048-6_10

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