In this paper, we review recent progress in SiGe MOS technology. Progress in high mobility p-channel and n-channel devices will be presented as well as some of the materials and processing issues related to the fabrication of these heterostructures. In addition, we will present an outlook on the integration of these devices to complimentary MOS (CMOS) based on Si on Insulator technology (SOI). New directions of novel devices utilizing selective epitaxial growth and the integration of Si/Ge superlattices for enhanced performance in field effect transistors are described. Finally, we will examine some of the materials challenges of integrating SiGe technologies with current CMOS production processes.
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References
SIA, Semiconductor Industry Association, The National Technology Roadmap of Semiconductors (1994).
L. PFEIFFER, K. W. WEST, H. L. STORMER and K. W. BALDWIN, Appl. Phys. Lett. 55 (1989) 1888.
J. SINGH, “Physics of Semiconductors and their Heterostructures” (McGraw Hill, 1993).
K. ISMAIL, M. ARAFA, K. L. SAENGER, J. O. CHU and B. S. MEYERSON, Appl. Phys. Lett. 66 (1995) 1077.
Y. H. XIE, E. A. FITZGERALD, D. MONROE, P. J. SILVERMAN and G. P. WATSON, J. Appl. Phys. 73 (1993) 8364.
Q. M. MA, K. L. WANG and J. N. SCHULMAN, Phys. Rev. B47 (1993) 1936.
K. L. WANG and R. P. G. KARUNASIRI, in “Semiconductor Quantum Wells and Superlattices for Long-Wavelength Infrared Detectors”, edited by M. O. Manasreh (Artech House, 1993) p. 139.
Y. H. XIE, D. MONROE, E. A. FITZGERALD, P. J. SILVERMAN, F. A. THIEL and G. P. WATSON, Appl. Phys. Lett. 63 (1993) 2263.
Y. H. XIE, E. A. FITZGERALD, D. MONROE, G. P. WATSON and P. J. SILVERMAN, Jpn. J. Appl. Phys. 33 (1994) 2372.
G. R. WAGNER and M. A. JANOCKO, Appl. Phys. Lett. 54 (1989) 66.
J. C. BEAN, Proceedings of the IEEE, IEEE, New York, 80 (1992) 571.
D. K. NAYAK, J. C. WOO, J. S. PARK, K. L. WANG and K. P. MACWILLIAMS, IEEE Elect. Dev. Lett. EDL-12 (1991) 154.
K. L. WANG and J. C. S. WOO, U.S. Patent 5,155,571, October 13, 1992, Complementary Field Effect Transistors Having Strained Superlattice Structures.
S. VERDONCKT-VANDEBROEK, E. F. CRABBE, B. S. MEYERSON, D. L. HARAME, P. J. RESTLE, J. M. C. STORK and J. B. JOHNSON, IEEE Trans. Elect. Dev. 41 (1994) 90.
E. BASARAN, R. A. KUBIAK, T. E. WHALL and E. H. C. PARKER, Appl. Phys. Lett. 64 (1994) 3470.
T. MISHIMA, C. W. FREDRIKSZ, G. F. A. v. d. WALLE, D. J. GRAVESTEIJN, R. A. v. d. HEUVEL and A. A. v. GORKUM, Appl. Phys. Lett. 57 (1990) 2567.
D. W. SMITH, C. J. EMELEUS, R. A. KUBIAK, E. H. C. PARKER and T. E. WHALL, Appl. Phys. Lett. 61 (1992) 1452.
J. S. PARK, R. P. G. KARUNASIRI, Y. J. MII and K. L. WANG, Appl. Phys. Lett. 58 (1991) 1083.
V. VENKATARAMAN, P. V. SCHWARTZ and J. C. STURM, Appl. Phys. Lett. 59 (1991) 2871.
R. PEOPLE, J. C. BEAN, D. V. LANG, A. M. SERGENT, H. L. STORMER, K. W. WECHT, R. T. LYNCH and K. BALDWIN, Appl. Phys. Lett. 45 (1984) 1231.
P. J. WANG, F. F. FANG, B. S. MEYERSON, J. NOCERA and B. PARKER, Appl. Phys. Lett. 54 (1989) 2701.
P. J. WANG, F. F. FANG, B. S. MEYERSON, J. NOCERA and B. PARKER, Appl. Phys. Lett. 55 (1989) 2334.
A. GOLD, Phys. Rev. B35 (1987) 723.
W. WALUKIEWICZ, Phys. Rev. B31 (1985) 5557.
J. A. MORIARTY and S. KRISHNAMURTHY, J. Appl. Phys. 54 (1983) 1892.
S. K. CHUN and K. L. WANG, IEEE Trans. Elect. Dev. 39 (1992) 2153.
J. M. HINCKLEY and J. SINGH, Phys. Rev. B41 (1990) 2912.
K. GOTO, J. MUROTA, T. MAEDA, R. SCHUTZ, K. AIZAWA, R. KIRCHER, K. YOKOO and S. ONO, Jpn. J. Appl. Phys. 32 (1993) 438.
P. M. GARONE, V. VENKATARAMAN and J. C. STURM, IEEE Elect. Dev. Lett. 13 (1992) 56.
P. M. GARONE, V. VENKATARAMAN and J. C. STURM, IEEE Elect. Dev. Lett. 12 (1991) 230.
D. K. NAYAK, J. C. S. WOO, G. K. YABIKU, K. P. MACWILLIAMS, J. S. PARK and K. L. WANG, IEEE Elect. Dev. Lett. 14 (1993) 520.
S. M. SZE, Physics of Semiconductor Devices (John Wiley & Sons, New York, 1981).
M. COPEL, M. C. REUTER, E. KAXIRAS and R. M. TROMP, Phys. Rev. Lett. 63 (1989) 632.
R. CAO, X. YANG, J. TERRY and P. PIANETTA, Appl. Phys. Lett. 61 (1992) 2347.
B. VOIGTLANDER and A. ZINNER, J. Vac. Sci. Technol. A12 (1994) 1932.
H. J. OSTEN, J. KLATT, G. LIPPERT and E. BUGIEL, J. Cryst. Growth 127 (1993) 396.
S. HIGUCHI and Y. NAKANISHI, Surf. Sci. 254 L465 (1991).
K. SAKAMOTO, K. KYOYA, K. MIKI, H. MATSUHATA and T. SAKAMOTO, Jpn. J. Appl. Phys. Lett. 32 L204 (1993).
A. SAKAI and T. TATSUMI, Appl. Phys. Lett. 64 (1994) 52.
D. K. NAYAK, J. C. S. WOO, J. S. PARK, K. L. WANG and K. P. MACWILLIAMS, Jpn. J. Appl. Phys. 33 (1994) 2412.
D. K. NAYAK, J. C. S. WOO, J. S. PARK, K. L. WANG and K. P. MACWILLIAMS, Appl. Phys. Lett. 62 (1993) 2853.
G. L. ZHOU and H. MORKOC, Thin Solid Films 231 (1993) 125.
F. STERN and S. E. LAUX, Appl. Phys. Lett. 61 (1992) 1110.
D. MONROE, Y. H. XIE, E. A. FITZGERALD, P. J. SILVERMAN and G. P. WATSON, J.Vac. Sci. Technol. B11 (1993) 1731.
A. R. POWELL, S. S. IYER and F. K. LEGOUES, Appl. Phys. Lett. 64 (1994) 1856.
C. H. CHERN, K. L. WANG, G. BAI and M. A. NICHOLET, Mat. Res. Soc. Symp. Proc. 220 (1991) 175.
S. M. HU, J. Appl. Phys. 70 R53 (1991).
G. ABSTREITER, H. BRUGGER, T. WOLF, H. JORKE and H. J. HERZOG, Phys. Rev. Lett. 54 (1985) 2441.
F. K. LEGOUES, A. POWELL and S. S. IYER, J. Appl Phys. 75 (1994) 7240.
R. DINGLE, H. L. STOERMER, A. C. GOSSARD and W. WIEGMANN, Appl. Phys. Lett. 33 (1978) 665.
F. SCHAEFFLER, Solid State Electron. 37 (1994) 765.
K. ISMAIL, S. F. NELSON, J. O. CHU and B. S. MEYERSON, Appl. Phys. Lett. 63 (1993) 660.
A. LEVITAS, Phys. Rev. 99 (1955) 1810.
M. GLICKSMAN, Phys. Rev. 111 (1958) 125.
H.-J. HERZOG, H. JORKE and F. SCHAEFFLER, Thin Solid Films 184 (1990) 237.
K. ISMAIL, B. S. MEYERSON and P. J. WANG, Appl. Phys. Lett. 58 (1991) 2117.
F. SCHAEFFLER and H. JORKE, Appl. Phys. Lett. 58 (1991) 397.
H. DAEMBKES, H. HERJOG, H. JORKE, H. KIBBEL and E. KASPER, IEEE Trans. Elect. Dev. ED-33 (1986) 633.
U. KOENIG and F. SCHAEFFLER, Elect. Lett. 27 (1991) 1405.
E. A. FITZGERALD, Y.-H. XIE, M. L. GREEN, D. BRASEN, A. R. KORTAN, J. MICHEL, Y.-J. MII and B. E. WEIR, Appl. Phys. Lett. 59 (1991) 811.
B. S. MEYERSON, K. J. URAM and F. K. LEGOUES, Appl. Phys. Lett. 53 (1988) 2555.
E. A. FITZGERALD, Mat. Sci. Reports 7 (1991) 87.
J. W. MATTHEWS, S. MADER and T. B. LIGHT, J. Appl. Phys. 41 (1970) 3800.
G. P. WATSON, E. A. FITZGERALD, Y. H. XIE, P. J. SILVERMAN, A. E. WHITE and K. T. SHORT, Appl. Phys. Lett. 63 (1993) 746.
E. A. BEAM and Y. C. KAO, J. Appl. Phys. 69 (1991) 4253.
E. A. FITZGERALD, Y.-H. XIE, D. MONROE, P. J. SILVERMAN, J. M. KUO, A. R. KORTAN, F. A. THIEL and B. E. WEIR, J. Vac. Sci Technol. B10 (1992) 1807.
G. P. WATSON, E. A. FITZGERALD, Y.-H. XIE and D. MONROE, J. Appl. Phys. 75 (1994) 263.
Y. J. MII, Y. H. XIE, E. A. FITZGERALD, D. MONROE, F. A. THIEL, B. E. WEIR and L. C. FELDMAN, Appl. Phys. Lett. 59 (1991) 1611.
F. SCHAEFFLER, D. TOEBBEN, H.-J. HERZOG, G. ABSTREITER and B. HOLLAENDER, Semicon. Sci. Technol. 7 (1992) 260.
K. ISMAIL, B. S. MEYERSON, S. RISHTON, J. CHU, S. NELSON and J. NOCERA, IEEE Elect. Dev. Lett. 13 (1991) 229.
K. ISMAIL, S. RISHTON, J. O. CHU, K. CHAN and B. S. MEYERSON, IEEE Elect. Dev. Lett. 14 (1993) 348.
U. KOENIG, A. J. BOERS, F. SCHAEFFLER and E. KASPER, Elect. Lett. 28 (1992) 160.
R. H. YAN, A. OURMAZD and K. F. LEE, IEEE Trans. Elect. Dev. ED-39 (1992) 1704.
D. GODBEY, L. PALKUTI, P. LEONOV, A. KRIST, J. WANG, M. TWIGG, H. HUGHES and K. HOBART, Mat. Res. Soc. Symp. Proc. 220 (1991) 291.
J. HAISMA, G. A. C. M. SPIERINGS, U. K. P. BIERMANN and J. A. PALS, Jpn. J. App. Phys. Part 1 28 (1989) 1426.
K. IMAI, Jpn. J. Appl. Phys. 30 (1991) 1154.
A. A. DEMKOV and O. F. SANKEY, Phys. Rev. B48 (1993) 2207.
K. L. WANG and J. S. PARK, U.S. Patent 5,357,119, October 18, 1994, Field Effect Devices Having Short Period Superlattice Structures Using Si and Ge.
E. KASPER, H. KIBBEL, H. JORKE, H. BRUGGER, E. FRIESS and G. ABSTREITER,Phys. Rev. B38 (1988) 3599.
P. M. ADAMS, R. C. B. BOWMAN Jr., C. C. AHN, S. J. CHANG, V. ARBET-ENGELS, M. K. KALLEL and K. L. WANG, J. Appl. Phys. 71 (1992) 4305.
H. SAKAKI, Proc. Int. Sym. Foundation of Quantum Mechanics 94 (1983).
P. F. YUH and K. L. WANG, Appl. Phys. Lett. 51 (1987) 1404.
X. QI and K. L. WANG, J. Appl. Phys. (to be published).
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Wang, K.L., Thomas, S.G. & Tanner, M.O. SiGe band engineering for MOS, CMOS and quantum effect devices. J Mater Sci: Mater Electron 6, 311–324 (1995). https://doi.org/10.1007/BF00125886
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DOI: https://doi.org/10.1007/BF00125886