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Use of ultrashort laser pulses for desorption from semiconductor surfaces and nonresonant post-ionization of sub-monolayers

  • Poster Session C: Surfaces Of Ceramics And Glass, Optical And Mass Spectroscopic Methods For Surface Analysis
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Summary

The system aspects of a completely optical surface-sensitive time-of-flight mass spectrometer are presented. Using picosecond laser pulses for non-thermal desorption of neutrals from semiconductor surfaces and their optical post-ionization, a laser based mass spectrometry of extremely high sensitivity has been developed and tested. Initial experimental results are presented concerning the desorption yield from semiconductor surfaces, the saturation of the post-ionization and the useful yield of the system.

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Authors and Affiliations

  1. Institute of Semiconductor Electronics, RWTH Aachen, Sommerfeldstrasse 24, W-5100, Aachen, Germany

    C. Trappe, M. Schütze, M. Raff, R. Hannot & H. Kurz

Authors
  1. C. Trappe
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  2. M. Schütze
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  3. M. Raff
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  4. R. Hannot
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  5. H. Kurz
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Trappe, C., Schütze, M., Raff, M. et al. Use of ultrashort laser pulses for desorption from semiconductor surfaces and nonresonant post-ionization of sub-monolayers. Fresenius J Anal Chem 346, 368–373 (1993). https://doi.org/10.1007/BF00321453

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  • DOI: https://doi.org/10.1007/BF00321453

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