Abstract
Structure formation upon 500 fs 248 nm KrF-laser irradiation of PolyEthylene Terephthalate (PET) and PolyImide (PI) has been investigated. The results obtained with fs pulses have been compared to those with ns pulses.
Similar content being viewed by others
References
R. Srinivasan, V. Mayne-Banton: Appl. Phys. Lett. 41, 576 (1982)
G. Koren, J.T.C. Yeh: Appl. Phys. Lett 44, 1112 (1984)
R. Srinivasan, S. Lazare: Polymer 26, 1297 (1985)
J.E. Sipe, J.F. Young, J.S. Preston, H.M. van Driel: Phys. Rev. B 27, 1141 (1983)
A.E. Siegman, P.M. Fauchet: IEEE J. QE-22, 1384 (1986)
M. Bolle, S. Lazare: Appl. Surf. Sci. 65/66, 349 (1993)
M. Bolle, S. Lazare: Appl. Surf. Sci. 69, 31 (1993)
M. Bolle, S. Lazare: J. Appl. Phys. 73, 3516 (1993)
P.E. Dyer, R.J. Farley: Appl. Phys. Lett. 57, 765 (1990)
P.E. Dyer, R.J. Farley: J. Appl. Phys. 74, 1442 (1993)
H.M. Phillips, D.L. Callahan, R. Sauerbrey, G. Szabo, Z. Bor: Appl. Phys. A 54, 158 (1992)
H.M. Phillips, D.L. Callahan, R. Sauerbrey, G. Szabo, Z. Bor: Appl. Phys. Lett. 58, 2761 (1991)
K.J. Ilcisin, R. Fedosejes: Appl. Opt. 26, 396 (1987)
E. Arenholz, V. Svorcik, T. Kefer, J. Heitz, D. Bäuerle: Appl. Phys. A 53, 330 (1991)
E. Arenholz, M. Wagner, J. Heitz, D. Bäuerle: Appl. Phys. A 55, 119 (1992)
W. Kesting, D. Knittel, T. Bahners, E. Schollmeyer: Angew. Macromol. Chem. 196, 179 (1992)
H. Niino, Y. Kawabata, A. Yabe: Jpn. J. Appl. Phys. 28, L2225 (1989)
J. Heitz, E. Arenholz, D. Bäuerle, H. Hibst, A. Hagemeyer, G. Cox: Appl. Phys. A 56, 329 (1993)
R. Srinivasan, E. Sutcliffe, B. Braren: Appl. Phys. Lett. 51, 1285 (1987)
S. Küper, M. Stuke: Appl. Phys. B 44, 199 (1987)
S. Küper, M. Stuke: Appl. Phys. Lett. 54, 4 (1989)
S. Preuss, M. Späth, Y. Zhang, M. Stuke: Appl. Phys. Lett. 62, 3049 (1993)
P. Schwab, J. Heitz, S. Proyer, D. Bäuerle: Appl. Phys. A 53, 282 (1991)
J. Ihlemann, B. Wolff, P. Simon: Appl. Phys. A 54, 363 (1992)
S. Szatmari, F.P. Schäfer: Opt. Commun. 68, 196 (1988)
S. Szatmari, F.P. Schäfer: Appl. Phys. B 46, 305 (1988)
H.M. Phillips, R. Sauerbrey: Opt. Eng. 32, 2424 (1993)
E. Arenholz, J. Heitz, V. Svorcik, D. Bäuerle: In Excimer Lasers, ed. by L.D. Laude, Nato ASI Ser. (Kluwer, Dordrecht 1994) (in press)