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Effects of UV-irradiation on the formation of oxide thin films from chemically modified metal-alkoxides

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Abstract

The effects of UV-irradiation on the properties of ZrO2 and TiO2 gel films prepared from corresponding metal-butoxides modified with acetylacetone (AcAc) or benzoylacetone (BzAc) have been studied. It was found that the chelate bonds of β-diketones remaining in the gel films were dissociated by the UV-irradiation. The UV-irradiation also changed the properties of the gel films such as solubility; the solubility in acidic solutions was decreased for ZrO2 gel films modified with AcAc and TiO2 gel films modified with BzAc became insoluble in alcohol. Based on these findings, a new fine-patterning process has been established, which enables us to make fine-patterns of ZrO2 and TiO2 films on a variety of substrates.

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Authors and Affiliations

  1. Department of Metallurgical Engineering, Kinki University, Kowakae, Higashi-Osaka, 577, Osaka, Japan

    N. Tohge

  2. Department of Applied Materials Science, Osaka Prefecture University, Gakuenchou, 593, Sakai, Osaka, Japan

    K. Shinmou & T. Minami

Authors
  1. N. Tohge
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  2. K. Shinmou
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  3. T. Minami
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Tohge, N., Shinmou, K. & Minami, T. Effects of UV-irradiation on the formation of oxide thin films from chemically modified metal-alkoxides. J Sol-Gel Sci Technol 2, 581–585 (1994). https://doi.org/10.1007/BF00486313

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  • DOI: https://doi.org/10.1007/BF00486313

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