Abstract
DC and AC conduction measurements were made on films of silicon oxide which had been fully annealed. Four activation energies were determined for the conduction processes. In the case of DC conduction a time-dependent absorption current was observed at low fields and this was related to a low-frequency dispersion. The steady-state current at low fields was ohmic. At high fields the conductivity was field-dependent and the usual Jα exp (βV 1/2) relationship was observed.
The low-frequency dispersion was found to affect the audio-frequency region at high temperatures. Above 10 kc/s the loss was independent of frequency up to 1 mc/s.
Similar content being viewed by others
References
G. Siddall, Vacuum 9 (1959) 274.
H. Hirose and Y. Wada, Jap. J. Appl. Phys. 3 (1965) 179.
Idem, ibid 4 (1965) 636.
I. T. Johansen, J. Appl. Phys. 37 (1966) 2.
T. E. Hartman, J. C. Blair, and R. Bauer, ibid 37 (1966) 6.
F. Argall, Ph.D. thesis, Chelsea College, London University (1968).
M. Stuart, Brit. J. Appl. Phys. 18 (1967) 1637.
Idem, Phys. Status Solidi. 23 (1967) 595.
D. V. Hamon, Proc. I.E.E. 99 (1952) 115.
A. K. Jonscher, Thin Solid Films 1 (1967) 213.
J. G. Simmons, Phys. Rev. 155 (1967) 657.
A. R. Morley and D. S. Campbell, Thin Solid Films 2 (1969) 403.
C. E. Drumheller, Trans. 7th Nat. Vac. Symp., edited by C. R. Maissel, (Pergamon, New York, 1961).
K. S. Cole and R. H. Cole, J. Chem. Phys. 9 (1941) 341.
M. E. Baird, Rev. Mod. Phys. 40 (1968) 219.
G. Williams, Trans. Faraday Soc. 58 (1962) 1041.
D. R. Lamb, “Electrical Conduction Mechanisms In Thin Insulating Films” (Methuen, London, 1967).
A. I. Gubanon, “Quantum Electron Theory of Amorphous Conductors” Consultants Bureau, New York, 1965).
N. F. Mott, Adv. Phys. 16 (1967) 49.
H. E. Taylor, Ph.D. thesis, University of Sheffield (1954).
A. E. Owen and R. W. Douglas, J. Soc. Glass Tech. 43 (1952) 159T.
M. Pollack and T. H. Geballe, Phys. Rev. 122 (1961) 1742.
A. Miller and E. Abrahams, ibid 120 (1960) 745.
J. J. O'Dwyer, Bull. Amer. Phys. Soc. 10 1965 189; J. Appl. Phys. 37 (1966) 599.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Morley, A.R., Campbell, D.S. & Anderson, J.C. Conduction processes in vacuum-deposited films of silicon oxide. J Mater Sci 4, 259–265 (1969). https://doi.org/10.1007/BF00549926
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF00549926