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The structure of willemite films on silicon

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Abstract

Thin films have been prepared on silicon substrates by reacting manganese doped zinc fluoride with silicon oxide. A structural analysis has shown that the films consist of small crystallites of alpha-zinc orthosilicate (willemite) embedded in a matrix of silicon oxide.

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  1. G. S. Edwards

    Present address: Oxley Developments Ltd., Priory Park, Ulverston, N. Lancs

Authors and Affiliations

  1. Department of Applied Physics and Electronics, University of Durham, UK

    G. S. Edwards & A. N. Rushby

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  1. G. S. Edwards
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  2. A. N. Rushby
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Edwards, G.S., Rushby, A.N. The structure of willemite films on silicon. J Mater Sci 6, 225–227 (1971). https://doi.org/10.1007/BF00550017

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  • DOI: https://doi.org/10.1007/BF00550017

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