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The equilibrium topography of sputtered amorphous solids II

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Abstract

The sputtering of an amorphous solid is considered analytically and the equations of motion of the changing surface topography derived.

These equations are solved to show that a steady state is reached only in conditions where the surface topography consists of planes aligned, either parallel or perpendicular to the direction of sputtering ion incidence.

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Reference

  1. M. J. Nobes, J. S. Colligon, and G. Carter, J. Mater. Sci. 4 (1969) 730.

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Authors and Affiliations

  1. Department of Electrical Engineering, University of Salford, M5 4WT, Salford, UK

    G. Carter, J. S. Colligon & M. J. Nobes

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  1. G. Carter
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  2. J. S. Colligon
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  3. M. J. Nobes
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Carter, G., Colligon, J.S. & Nobes, M.J. The equilibrium topography of sputtered amorphous solids II. J Mater Sci 6, 115–117 (1971). https://doi.org/10.1007/BF00550340

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  • DOI: https://doi.org/10.1007/BF00550340

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