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Investigation of the aerial oxidation of films prepared on silicon by the action of HF-NaNO2 solutions

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Literature cited

  1. A. Uhlir, Bell. Syst. Tech. J.,35, 333 (1956).

    Google Scholar 

  2. D. R. Turner, J. Electrochem. Soc.,105, 402 (1958).

    Google Scholar 

  3. K. Ono and S. Yagi, Elec. Comm. Lab. Tech. J.,15, 903 (1966).

    Google Scholar 

  4. R. J. Archer, J. Phys. Chem. Solids,14, 104 (1960).

    Google Scholar 

  5. B. B. Loginov, Zh. Prikl. Spektrosk.,50, 1683 (1977).

    Google Scholar 

  6. B. B. Loginov and V. P. Gaidaenko, Elektron. Tekh., Ser. 2, Part 5 (97), 69 (1975).

    Google Scholar 

  7. K. H. Beckman, Surf. Sci.,3, 14 (1965).

    Google Scholar 

  8. S. Yoshioka and S. Takayanagi, Jap. J. Appl. Phys.,4, 828 (1965).

    Google Scholar 

  9. S. Yoshioka, Philips Res. Rep.,24, 299 (1969).

    Google Scholar 

  10. H. Yamanaka, M. Sakamoto, and K. Hamono, Jap. J. Appl. Phys.,14, 203 (1975).

    Google Scholar 

  11. L. Bellamy, Infrared Spectra of Complex Molecules, Methuen, London (1958).

    Google Scholar 

  12. Practical Guide on the Analysis of Monomeric and Polymeric Compounds [in Russian], Goskhimizdat, Moscow (1962).

  13. L. M. Sverdlov, M. A. Kovner, and E. P. Krainov, The Vibrational Spectra of Polyatomic Molecules [in Russian], Nauka, Moscow (1970).

    Google Scholar 

  14. K. Nakamoto, The Infrared Spectra of Inorganic and Coordination Compounds, Wiley, New York (1963).

    Google Scholar 

  15. A. A. Chuiko, V. A. Tertykh, V. A. Khrapovskii, Yu. P. Egorov, and L. M. Roev, Teor. Prikl. Khim.,2, 247 (1966).

    Google Scholar 

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Authors
  1. B. B. Loginov
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  2. V. P. Gaidaenko
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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 31, No. 1, pp. 126–131, July, 1979.

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Loginov, B.B., Gaidaenko, V.P. Investigation of the aerial oxidation of films prepared on silicon by the action of HF-NaNO2 solutions. J Appl Spectrosc 31, 900–904 (1979). https://doi.org/10.1007/BF00608559

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  • DOI: https://doi.org/10.1007/BF00608559

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