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Formation of dielectric and semiconductor thin films by laser-assisted evaporation

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Abstract

Laser-assisted evaporation is an emerging novel thin film deposition technique. It has been successfully applied to a variety of dielectric and semiconductor materials. Characteristics of the evaporation process and of the evaporants, resulting from the interaction of high power radiation with matter, often result in better structural and chemical properties of the films than can be obtained by conventional evaporative techniques. Congruent evaporation, the presence of energetic vapor species, and precise rate control are important advantageous features of this technique. The physics of laser-induced evaporation and plasma formation, some engineering aspects, and properties of dielectric and semiconductor thin films deposited by this technique are discussed in this review.

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References

  1. H.M. Smith, A.F. Turner: Appl. Opt.4, 147 (1965)

    Google Scholar 

  2. D. Dimitrov, S. Metev, I. Gugov, V. Kozhukarov: J. Mat. Sci. Lett.1, 334 (1982)

    Google Scholar 

  3. H. Sankur, J. DeNatale, W. Gunning, J.G. Nelson: J. Vac. Sci. Techn. A5, 2869 (1987)

    Google Scholar 

  4. S.V. Gaponov, A.A. Gudkov, E.B. Klyuenkov, V.V. Kropotin: Izvest. Aka d. Nauk. SSSR44, 2097 (1980)

    Google Scholar 

  5. H. Sankur, J.T. Cheung: J. Vac. Sci. Techn.A1, 1806 (1983)

    Google Scholar 

  6. J.T. Cheung, T. Magee: J. Vac. Sci. Techn.A1, 1604 (1983)

    Google Scholar 

  7. S.V. Gaponov, B.M. Luskin, N.N. Salashencko: Solid State Commun.39, 301 (1981)

    Google Scholar 

  8. D. Dijkkamp, T. Venkatesan, X.D. Wu, S.A. Shaheen, N. Jisrawi, Y.H. Min-Lee, W.L. Mclean, M. Croft: Appl. Phys. Lett.51, 619 (1987)

    Google Scholar 

  9. X.D. Wu, D. Dijkkamp, S.B. Olale, A. Ina, E.W. Chase, P.F. Miceli, C.C. Chan, J.M. Tarascon, T. Venkatesan: Appl. Phys. Lett.51, 861 (1987)

    Google Scholar 

  10. P.T. Murray, J.D. Wolf, J.A. Mescher, J.T. Grant: Mat. Lett.5, 250 (1987)

    Google Scholar 

  11. J.T. Cheung, J. Madden: J. Vac. Sci. Techn.B 5, 705 (1987)

    Google Scholar 

  12. J.T. Cheung: Appl. Phys. Lett.52, 1940 (1987)

    Google Scholar 

  13. J.T. Cheung, H. Sankur: “Growth of Thin Films by Laser Induced Evaporation,” to be published in CRC Critical Review (Dec. 1988)

  14. L. Harris, B.M. Siegel: J. Appl. Phys.19, 730 (1948)

    Google Scholar 

  15. N. Bloembergen: Proc. Symp. H. Mat. Res. Soc. 1–11 (1978)

  16. J.F. Ready: J. Appl. Phys.36, 462 (1965)

    Google Scholar 

  17. Duley:Laser Processing and Analysis of Materials (Plenum, New York 1976)

    Google Scholar 

  18. M. Lax: J. Appl. Phys.48, 3919 (1977)

    Google Scholar 

  19. J.T. Cheung: Proc. Mat. Res. Soc. Symp.29, 301 (1983)

    Google Scholar 

  20. J.F. Ready:Effects of High Power Laser Radiation (Academic, New York 1971)

    Google Scholar 

  21. S.I. Anisimov, A.M. Bonch-Bruevich, M.A. Eljashvich, A.Y. Imas, S. Romanov, N.A. Pavlenko: Sov. J. Tech. Phys.34, 7 (1966)

    Google Scholar 

  22. C.L. Chan, J. Mazumder: J. Appl. Phys.62, 4580 (1987)

    Google Scholar 

  23. O.N. Krokhin:Laser Handbook, ed. by F.T. Arecchi, E.O. Schulz Dubois (North-Holland, Amsterdam 1972) p. 1371

    Google Scholar 

  24. L.L. Levenson, S.D. Traynor, G.A. Brost, F. Ziembo, F.J. Seiler: Scan. Microsc.1, 457 (1987)

    Google Scholar 

  25. A. Caruso, B. Bertotti, P. Guipponi: Nuevo Cimento155B, 176 (1966)

    Google Scholar 

  26. Y.V. Afanasiyev, O.N. Krokhin, G.V. Sklizkov: IEEE J. Quant. Electron.QE2, 483 (1966)

    Google Scholar 

  27. A.E. Kuznetsov, A.A. Orlov, P.I. Ulyakov: Sov. J. Quant. Electron.2, 44 (1972)

    Google Scholar 

  28. D.B. Chang, J.E. Drummond, R.B. Hall: J. Appl. Phys.41, 4851 (1970)

    Google Scholar 

  29. I.V. Aleshin, A.M. Bonch-Bruevich, Y.A. Imas, M.N. Libenson, G.M. Rubanova, V.S. Salyadinov: Sov. Phys. Tech. Phys.22, 1400 (1977)

    Google Scholar 

  30. B.E. Knox: Mater. Res. Bull.3, 329 (1968)

    Google Scholar 

  31. B.E. Knox, V.S. Ban, J. Schottmiller: Mater. Res. Bull.3, 337 (1968)

    Google Scholar 

  32. V.S. Ban, B.E. Knox: J. Chem. Phys.52, 243 (1970)

    Google Scholar 

  33. V.S. Ban, B.E. Knox: J. Chem. Phys.51, 524 (1969)

    Google Scholar 

  34. C. Fauquinon, F. Floux: Phys. Fluids13, 386 (1970)

    Google Scholar 

  35. G.J. Pert: Plasma Phys.16, 1019 (1974)

    Google Scholar 

  36. T.P. Hughes:Plasmas and Laser Light (Wiley, New York 1975)

    Google Scholar 

  37. H. Sankur, J.G. Nelson, A.T. Pritt, Jr., W.J. Gunning: J. Vac. Sci. Techn.A5, 15 (1987)

    Google Scholar 

  38. P.S.P. Wei, R.B. Hall, W.E. Mäher: J. Chem. Phys.59, 3692 (1973)

    Google Scholar 

  39. M. Hanabusa, M. Suzuki, S. Nishigaki: Appl. Phys. Lett38, 385 (1981)

    Google Scholar 

  40. Y.A. Bykovskii, N.N. Degtyarenko, V.F. Elesin, V.E. Kondrashov, E.E. Lovetskii: Sov. Phys. Techn. Phys.18, 1597 (1974)

    Google Scholar 

  41. P.E. Dyer, S.A. Ramsden, J.A. Sayers, M.A. Skipper: J. Phys.D 9, 373 (1976)

    Google Scholar 

  42. S.V. Gaponov, M.D. Strikovskii: Sov. Phys. Tech. Phys.27, 1127 (1982)

    Google Scholar 

  43. A.D. Akhsakhalyan, Y.A. Bityurin, S.V. Gaponov, A.A. Gudkov, V.I. Luchin: Sov. Phys. Tech. Phys.27, 969 (1982)

    Google Scholar 

  44. H. Sankur: Laser Evaporation Studies, Annual Report No. 2, Air Force Office of Scientific Research, F49620-84-091, 1986

  45. J.E. Rothenberg, G. Koren: Appl. Phys. Lett.44, 664 (1984)

    Google Scholar 

  46. A. Namiki, K. Watabe, H. Fukano, S. Nishiaki, T. Noda: J. Appl. Phys.54, 3443 (1983)

    Google Scholar 

  47. N. Itoh, T. Nakayama: Phys. Lett.92A, 471 (1982)

    Google Scholar 

  48. J.T. Cheung: unpublished results

  49. H. Sankur, W.J. Gunning, J. DeNatale: “Epitaxial Ge Films Deposited by TEA-CO2 Laser Evaporation of Liquid Ge.” J. Appl. Phys. (to be published)

  50. E.B. Graper: J. Vac. Sci. Techn.10, 100 (1973)

    Google Scholar 

  51. H. Sankur, R.B. Hall: Appl. Opt.24, 3343 (1985)

    Google Scholar 

  52. H. Schwartz, H.A. Tourtellette: J. Vac. Sci. Techn.6, 3763 (1969)

    Google Scholar 

  53. N. Mandani, K.G. Nichols: J. Phys. D3, L7 (1970)

    Google Scholar 

  54. M.I. Baleva, M.H. Maksimov, S.M. Metev, M.S. Sendova: J. Mat. Sci. Lett.5, 533 and 537 (1986)

    Google Scholar 

  55. G. Hass, J.B. Ramsey: Appl. Opt.8, 1115 (1969)

    Google Scholar 

  56. P.M. Fauchet, A.E. Siegman: Appl. Phys. Lett.40, 824 (1982)

    Google Scholar 

  57. S.V. Gaponov, V.N. Genkin, A.A. Gudkov, M.Y. Mylukov: Sov. Phys. Techn. Phys.27, 822 (1982)

    Google Scholar 

  58. C.S. Bartholomew, H.T. Betz, J.L. Greiser, R.A. Spence, N.P. Murarka: to be published in SPIE Proc. No. 31, Optical & Optoelectronic Applied Science & Engineering, San Diego, 1987

  59. D. Lubben, S.A. Barnett, K. Suzuki, S. Gorbatkin, J.E. Greene: J. Vac. Sci. Techn. B3, 968 (1985)

    Google Scholar 

  60. W.P. Barr: J. Phys. E.2, 1024 (1969)

    Google Scholar 

  61. S.V. Gaponov, A.A. Gudkov, A.A. Freereman: Sov. Phys. Techn. Phys.27, 1130 (1982)

    Google Scholar 

  62. H. Sankur: Final Report on Physics of Laser Evaporation, No. F49620-84-C-0091

  63. G. Groh: J. Appl. Phys.39, 5804 (1968)

    Google Scholar 

  64. V.S. Ban, D.A. Kramer: J. Mat. Sci.5, 978 (1972)

    Google Scholar 

  65. H. Sankur, W.H. Southwell: Appl. Opt.23, 2770 (1984)

    Google Scholar 

  66. H. Sankur, F. Woodbury, R.H. Hall, W. Gunning: Properties of Thin Fluoride Films Deposited by Laser-Assisted Evaporation, Mat. Res. Symp., Boston, MA, 1986

  67. H. Sankur: Appl. Opt.25, 1962 (1986)

    Google Scholar 

  68. H. Sankur, E. Motamedi: “Properties of Thin Films of ZnO Prepared by Laser Assisted Deposition,” Proc. IEEE Ultrasonics Symp., Atlanta (1983)

  69. C. Cali, V. Daneu, A. Orioli, S. Riva Sanseverino: Appl. Opt.15, 1327 (1976)

    Google Scholar 

  70. Y.A. Bykovskii, V.M. Boyakov, V.T. Galochkin, A.S. Molchanov, I.N. Nikolaev, A.N. Oraevski: Sov. Phys. Techn. Phys.23, 578 (1978)

    Google Scholar 

  71. N.I. Pozdynak, V.S. Mylnikov: Sov. Phys. Techn. Phys.24, 107 (1979)

    Google Scholar 

  72. A.W. Stephen, T.J. Zrebiec, V.S. Ban: Mat. Res. Bull.9, 1427 (1974)

    Google Scholar 

  73. B.K. Kothani: Lunar Planetary Sci.10, 21 (1979)

    Google Scholar 

  74. J. Deserret, J.F. Elay: Thin Solid Films29, 29 (1975)

    Google Scholar 

  75. R.S. Adrain, J. Watson: J. Phys.D17, 1915 (1984)

    Google Scholar 

  76. Liesolette Moenke-Blankenburg: InAdvances in Optical and Electron Microscopy, Vol. 9, ed. by R. Barer, V.E. Coslett (Academic, New York 1984)

    Google Scholar 

  77. P.K. Bhat, J.T. Dubowski, D.F. Williams: Appl. Phys. Lett.47, 1085 (1985)

    Google Scholar 

  78. P.J. Martin: J. Mat. Sci.21, 1 (1983)

    Google Scholar 

  79. S.V. Gaponov, B.M. Luskin, B.A. Nesterov, N.N. Salashchenko: Sov. Phys. Solid. State19, 1736 (1977)

    Google Scholar 

  80. P.J. Martin, R.P. Netterfield, W.G. Sainty: J. Appl. Phys.55, 235 (1984)

    Google Scholar 

  81. Y. Ohmachi, T. Nishioka, Y. Shinoda: J. Appl. Phys.54, 5466 (1983)

    Google Scholar 

  82. S.V. Gaponov, E.B. Klyuenkov, B.A. Nesterov, N.N. Salashchenko, M.I. Kheifets: Sov. Techn. Phys. Lett.5, 193 (1979)

    Google Scholar 

  83. S.V. Gaponov, B.M. Luskin, B.A. Nesterov, N.N. Salashchenko: Sov. Techn. Phys. Lett.3, 234 (1977)

    Google Scholar 

  84. R.N. Sheftal, I.V. Cherbakov: Crys. Res. Techn.16, 887 (1981)

    Google Scholar 

  85. S.V. Gaponov, E.B. Klyuenkov, E.B. Nesterov, N.N. Salashchenko, M.I. Kheifets: Sov. Techn. Phys. Lett.5, 193 (1979)

    Google Scholar 

  86. S.V. Gaponov, B.M. Luskin, N.N. Salashchenko: Solid State Commun.39, 301 (1981)

    Google Scholar 

  87. S. Fujimori, T. Kasai, T. Inamura: Thin Solid Films92, 71 (1982)

    Google Scholar 

  88. T. Sato, S. Furuno, S. Jquchi, M. Hanabusa: Jpn. J. Appl. Phys.26, L1487 (1987)

    Google Scholar 

  89. T. Nakayama: Surf. Sci.133, 101 (1983)

    Google Scholar 

  90. J. Reif, H. Fallgren, W.E. Cooke, E. Matthias: Appl. Phys. Lett.49, 70 (1986)

    Google Scholar 

  91. V.P. Zakharov, I.M. Protas: Sov. Phys. Techn. Phs.17, 528 (1972)

    Google Scholar 

  92. G.P. Schwartz, V.E. Bondybey, J.H. English, G.J. Gualtieri: Appl. Phys. Lett.42, 952 (1983)

    Google Scholar 

  93. S.V. Gaponov, B.M. Luskin, B.A. Nesterov, N.N. Salashchenko: Sov. Phys. Techn. Phys.19, 1736 (1977)

    Google Scholar 

  94. Yu.A. Bykovskii, A.G. Dudalov, V.P. Kuzlenkov, P.A. Leontev: JETP Lett.20, 135 (1974)

    Google Scholar 

  95. G. Carter: J. Vac. Sci. Techn.7, 31 (1969)

    Google Scholar 

  96. T. Venkatesan: Pulsed Laser Deposited Y-Ba-Cu-O Films, presented at the Amer. Vac. Soc. Meet., Anaheim, Oct., 1987

  97. M. Hanabusa, M. Suzuki, S. Nishigaki: Appl. Phys. Lett.38, 385 (1981)

    Google Scholar 

  98. H. Oesterreicher, H. Bittner, B. Kothari: J. Solid State Chem.26, 97 (1978)

    Google Scholar 

  99. J.T. Cheung, D.T. Cheung: J. Vac. Sci. Techn.21, 182 (1982)

    Google Scholar 

  100. Maisel & Glang, Handbook of Thin Film Technology, 1–58 (McGraw-Hill, New York 1970)

  101. V.M. Dubkov: Sov. J. Opt. Techn.49, 168 (1982)

    Google Scholar 

  102. A. McKinley, A.W. Parke, G.J. Hughes, J. Fryar, R.H. Williams: J. Phys. D13, L193 (1980)

    Google Scholar 

  103. C. Arnone, V. Daneu, S. Riva Sanseverino: Appl. Phys. Lett.37, 1012 (1980)

    Google Scholar 

  104. B.A. Volodin, S.V. Gaponov, E.B. Klyuenkov, B.A. Nesterov, N.N. Salashchenko: Sov. Phys. Semic.15, 688 (1981)

    Google Scholar 

  105. H. Yokoyama: Appl. Phys. Lett.49, 1356 (1986)

    Google Scholar 

  106. J.T. Cheung: Proc. Mat. Res. Soc. Symp.29, 301 (1983)

    Google Scholar 

  107. J.T. Cheung: Appl. Phys. Lett.43, 255 (1983)

    Google Scholar 

  108. J.T. Cheung, M. Khoshnevisan, T. Magee: Appl. Phys. Lett.43, 462 (1983)

    Google Scholar 

  109. J.T. Cheung, G. Niizawa, J.K. Moyle, N.P. Ong, B.M. Paine, T.J. Vreeland: J. Vac. Sci. Techn. A4, 2086 (1986)

    Google Scholar 

  110. N.P. Ong, T.K. Moyle, J. Bajaj, J.T. Cheung: J. Vac. Sci. Techn. A5, 3079 (1987)

    Google Scholar 

  111. J.T. Cheung, J. Madden: J. Vac. Sci. Techn. B5, 705 (1987)

    Google Scholar 

  112. J.T. Cheung, J. Chen, N. Otsuka: “Studies on HgCdTe Superlattices With Nonrectangular Quantum Wells,” Proc. IRIS IR Detector Specialty Group, Seattle, Wash. Aug. 1987

  113. H. Sankur, W. Gunning: Optical Films deposited by Laser evaporation. Appl. Opt. (to be published)

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Sankur, H., Cheung, J.T. Formation of dielectric and semiconductor thin films by laser-assisted evaporation. Appl. Phys. A 47, 271–284 (1988). https://doi.org/10.1007/BF00615933

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