Skip to main content
Log in

Thermal double donors in silicon

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

A family of double donors with only slightly differing binding energies can be generated in silicon containing oxygen. In the 30 years since they were discovered the microscopic structure of these defects has not been unravelled in spite of being investigated with all the tools of solid state physics.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. M.L. Swanson: Phys. Status Solidi33, 721 (1933)

    Google Scholar 

  2. H.J. Rijks, J. Bloem, L.J. Giling: J. Appl. Phys.50, 1370 (1979)

    Google Scholar 

  3. C.S. Fuller, J.A. Ditzenberger, N.B. Hannay, E. Buehler: Phys. Rev.96, 833 (1954)

    Google Scholar 

  4. W. Cazcarra, P. Zunino: J. Appl. Phys.51, 4206 (1980)

    Google Scholar 

  5. J.A. Griffin, H. Navarro, L. Genzel: InOxygen, Carbon, Hydrogen, and Nitrogen in Silicon, ed. by J.C. Mikkelsen, Jr., S.J. Pearton, J.W. Corbett, S.J. Pennycook, Symposia Proceedings, Vol. 59 (Materials Research Society, Pittsburgh, Pa. 1986) p. 139

    Google Scholar 

  6. H. Navarro, J. Griffin, J. Weber, L. Genzel: Solid State Commun.58, 151 (1986)

    Google Scholar 

  7. W. Kohn, J.M. Luttinger: Phys. Rev.98, 915 (1955)

    Google Scholar 

  8. R.A. Faulkner: Phys. Rev.184, 713 (1969)

    Google Scholar 

  9. H.G. Grimmeiss, E. Janzén: InDefects in Semiconductors II, ed. by S. Mahajan, J.W. Corbett, Symposia Proceedings, Vol. 14 (North-Holland, New York 1983) p. 33

    Google Scholar 

  10. M. Kleverman, J. Olajos, G. Grossman, H.G. Grimmeiss: InDefects in Electronic Materials, ed. by M. Stavola, S.J. Pearton, G. Davies, Symposia Proceedings, Vol. 104 (Materials Research Society, Pittsburgh, Pa. 1988) p. 141

    Google Scholar 

  11. H.A. Bethe, E.E. Salpeter:Quantum Mechanics of One- and Two-Electron Atoms (Springer, Berlin, Heidelberg 1957)

    Google Scholar 

  12. P. Wagner, C. Holm, E. Sirtl, R. Oeder, W. Zulehner: InAdvances in Solid States Physics, Vol. XXIV, ed. by P. Grosse (Vieweg-Pergamon, Braunschweig 1984) p. 191

    Google Scholar 

  13. L.T. Ho, A.K. Ramdas: Phys. Rev. B5, 462 (1972)

    Google Scholar 

  14. A.R. Bean, R.C. Newman: J. Phys. Chem. Sol.33, 255 (1972)

    Google Scholar 

  15. D. Wruck, P. Gaworzewski: Phys. Status Solidi (a)56, 557 (1979)

    Google Scholar 

  16. H.F. Schaake, S.C. Barber, R.F. Pinizotto: InSemiconductor Silicon 1981, ed. by H.R. Huff, R.J. Kriegler, Y. Takeishi (The Electrochemical Soc., Inc., Pennington, N.J. 1981)

    Google Scholar 

  17. K.M. Lee, J.M. Trombetta, G.D. Watkins: InMicroscopic Identification of Electronic Defects in Semiconductors, Vol. 46, ed. by N.M. Johnson, S.G. Bishop, G.D. Watkins (Materials Research Society Symposia Proceedings, Pittsburgh, Pa. 1985) p. 263

  18. M. Stavola, K.M. Lee: In Ref. [5] p. 95

    Google Scholar 

  19. M. Stavola, K.M. Lee, J.C. Nabity, P.E. Freeland, L.C. Kimerling: Phys. Rev. Lett.54, 2639 (1985)

    Google Scholar 

  20. W.W. Keller: J. Appl. Phys.55, 3471 (1984)

    Google Scholar 

  21. A.K. Ramdas, S. Rodriguez: Rep. Prog. Phys.44, 1297 (1981)

    Google Scholar 

  22. P. Wagner, H. Gottschalk, J.M. Trombetta, G.D. Watkins: J. Appl. Phys.61, 346 (1987)

    Google Scholar 

  23. P. Wagner, H. Gottschalk, J.M. Trombetta, G.D. Watkins: InDefects in Semiconductors, ed. by H.J. von Bardeleben, Vol. 10–12 (Materials Science Forum Trans Tech Publication Ltd., Switzerland 1986) p. 961

    Google Scholar 

  24. S. Muller, M. Sprenger, E.G. Sieverts, C.A.J. Ammerlaan: Solid State Commun25, 987 (1978)

    Google Scholar 

  25. J. Michel, J.R. Niklas, J.M. Spaeth: In Ref. [10] p. 185

    Google Scholar 

  26. J. Michel, J.R. Niklas, J.M. Spaeth, C.M. Weinert: Phys. Rev. Lett.57, 611 (1986)

    Google Scholar 

  27. D.A. van Wezep, T. Gregorkiewicz, H.H.P.Th. Bekman, C.A.J. Ammerlaan: In Ref. [23] p. 1009

    Google Scholar 

  28. T. Gregorkiewicz, D.A. van Wezep, H.H.P.Th. Bekman, C.A.J. Ammerlaan: Phys. Rev. B35, 3810 (1987)

    Google Scholar 

  29. M. Stavola, L.C. Snyder: InDefects in Silicon, ed. by L.C. Kimerling, M. Bullis (The Electrochemical Society, Inc., Pennington, N.J. 1983)

    Google Scholar 

  30. A. Ourmazd, W. Schröter, A. Bourret: J. Appl. Phys.56, 1670 (1984)

    Google Scholar 

  31. L.C. Kimerling: In Ref. [5] p. 83

    Google Scholar 

  32. J.L. Benton, K.M. Lee, P.E. Freeland, L.C. Kimerling: InProc. of the 13th Int. Conf. on Defects in Semiconductors, ed. by L.C. Kimerling, J.M. Parsey, Jr. (The Metallurgical Society of AIME, Warrendale, Pa. 1985) p. 647

    Google Scholar 

  33. H.J. Hoffmann, H. Nakayama, T. Nishino, Y. Hamakawa: Appl. Phys. A33, 47 (1984)

    Google Scholar 

  34. J. Weber, R. Sauer: In Ref. [9] p. 165

    Google Scholar 

  35. J. Weber, H.J. Queisser: In Ref. [5] p. 147

    Google Scholar 

  36. J. Weber, K. Köhler, F.J. Stützler, H.J. Queisser: In Ref. [23] p. 979

    Google Scholar 

  37. M. Tajima, P. Stallhofer, D. Huber: Jap. J. Appl. Phys.22, L586 (1983)

    Google Scholar 

  38. N.S. Minaev, A.V. Mudryi: Phys. Status Solidi (a)68, 561 (1981)

    Google Scholar 

  39. H. Nakayama, J. Katsura, T. Nishino, Y. Hamakawa: Jpn. J. Appl. Phys.19, L547 (1980)

    Google Scholar 

  40. P. Rava, H.C. Gatos, J. Lagowski: J. Electrochem. Soc.129, 2845 (1982)

    Google Scholar 

  41. W. Kaiser, H.L. Frisch, H. Reiss: Phys. Rev.112, 1546 (1958)

    Google Scholar 

  42. R. Oeder, P. Wagner: In Ref. [9] p. 171

    Google Scholar 

  43. H.J. Hrostowski, R.H. Kaiser: Phys. Rev. Lett.1, 199 (1958)

    Google Scholar 

  44. B. Pajot, H. Compain, J. Lerouille, B. Clerjaud: InProc. of the 16th Int. Conf. on the Physics of Semiconductors, Montpellier, 1982

  45. M. Suezawa, K. Sumino: Mater. Lett.2, 85 (1983)

    Google Scholar 

  46. M. Suezawa, K. Sumino: Phys. Status Solidi (a)82, 235 (1984)

    Google Scholar 

  47. P. Wagner, C. Holm: In Ref. [32] p. 677

    Google Scholar 

  48. B. Pajot, J. von Bardeleben: In Ref. [32] p. 685

    Google Scholar 

  49. P. Wagner: In Ref. [5] p. 125

    Google Scholar 

  50. R.C. Newman: J. Phys. C18, L967 (1985)

    Google Scholar 

  51. T.Y. Tan, R. Kleinbenz, C.P. Schneider: In Ref. [5] p. 195

    Google Scholar 

  52. G.S. Oehrlein, J.L. Lindström, S.A. Cohen: In Ref. [32] p. 701

    Google Scholar 

  53. M. Suezawa, K. Sumino: Phys. Status Solidi (a)85, 469 (1984)

    Google Scholar 

  54. W. Zulehner: InAggregation Phenomena of Point Defects in Silicon, Proceedings Vol. 83–4, ed. by E. Sirtl, J. Goorissen (The Electrochemical Society, Inc., Pennington, N.J.) p. 89

  55. G.S. Oehrlein, J.W. Corbett: In Ref. [9] p. 107

    Google Scholar 

  56. U. Goesele, K.Y. Ahn, B.P.R. Marioton, T.Y. Tan, S.T. Lee: Appl. Phys. A48 (in press)

  57. K. Wada: Phys. Rev. B30, 5884 (1984)

    Google Scholar 

  58. J.T. Borenstein, D. Peak, J.W. Corbett: In Ref. [5] p. 173

    Google Scholar 

  59. D. Mathiot: Appl. Phys. Lett.51, 904 (1987)

    Google Scholar 

  60. D.K. Schroder, C.S. Chen, J.S. Kang, X.D. Song: J. Appl. Phys.63, 136 (1988)

    Google Scholar 

  61. C.S. Chen, D.K. Schroder: J. Appl. Phys.63, 5761 (1988)

    Google Scholar 

  62. H.J. Stein, S.K. Hahn, S.C. Shatas: J. Appl. Phys.59, 3495 (1986)

    Google Scholar 

  63. M. Claybourn, R.C. Newman: Appl. Phys. Lett.51, 2197 (1987)

    Google Scholar 

  64. L.C. Snyder: In Ref. [10] p. 179

    Google Scholar 

  65. W. Bergholz, J.L. Hutchinson, P. Pirouz: J. Appl. Phys.58, 3419 (1985)

    Google Scholar 

  66. D. Mathiot: In Ref. [10] p. 189

    Google Scholar 

  67. A.R. Brown, M. Claybourn, R. Murray, P.S. Nandhra, R.C. Newman, J.H. Tucker: Semicond. Sci. Technol.3, 591 (1988)

    Google Scholar 

  68. C.S. Fuller, R.A. Logan: J. Appl. Phys.28, 1427 (1957)

    Google Scholar 

  69. D. Helmreich, E. Sirtl: InSemiconductor Silicon 77, ed. by H.R. Huff, E. Sirtl (The Electrochemical Soc., Inc., Princeton, N.J. 1977)

    Google Scholar 

  70. V.D. Tkachev, L.F. Makarenko, V.P. Markevich, L.I. Murin: Sov. Phys. Semicond.18, 324 (1984)

    Google Scholar 

  71. L.F. Makarenko, V.P. Markevich, L.I. Murin: Sov. Phys. Semicond.19, 1192 (1985)

    Google Scholar 

  72. Ya.I. Latushko, L.F. Makarenko, V.P. Markevich, L.I. Murin: Phys. Status Solidi (a)93, K181 (1986)

    Google Scholar 

  73. D.H. Wruck, F. Spiegelberg: Phys. Status Solidi (b)133, K39 (1986)

    Google Scholar 

  74. A. Chantre: Appl. Phys. Lett.50, 1500 (1987)

    Google Scholar 

  75. G.D. Watkins: In Ref. [12]In p. 163

    Google Scholar 

  76. M. Stavola, J.R. Patel, L.C. Kimerling, P.E. Freeland: Appl. Phys. Lett.42, 73 (1983)

    Google Scholar 

  77. A.K. Tipping, R.C. Newman, D.C. Newton, J.H. Tucker: In Ref. [23] p. 887

    Google Scholar 

  78. S. Dannefaer, D. Kerr: J. Appl. Phys.60, 1313 (1986)

    Google Scholar 

  79. H. Böhm:Einführung in die Metallkunde, B.I. Hochschultaschenbücher, Bd. 196/196a (Bibliographisches Institut, Mannheim 1968)

    Google Scholar 

  80. H.P. Hjalmarson, P. Vogl, D.J. Wolford, J.D. Dow: Phys. Lett.44, 810 (1980)

    Google Scholar 

  81. O.F. Sankey, J.D. Dow: Phys. Rev. B26, 3243 (1982)

    Google Scholar 

  82. V.A. Singh, U. Lindefeit, A. Zunger: Phys. Rev. B27, 4909 (1983)

    Google Scholar 

  83. G.D. Watkins, J.W. Corbett: Phys. Rev.121, 1001 (1961)

    Google Scholar 

  84. R. van Kemp, E.G. Sieverts, C.A.J. Ammerlaan: In Ref. [23] p. 875

    Google Scholar 

  85. P.M. Henry, J.W. Farmer, J.M. Meese: Appl. Phys. Lett.45, 454 (1984)

    Google Scholar 

  86. J.L. Lindström, B.G. Svensson: In Ref. [5] p. 45

    Google Scholar 

  87. C.S. Chen, J.C. Corelli, G.D. Watkins: Phys. Rev.B5, 510 (1972)

    Google Scholar 

  88. R. Pflueger, J.C. Corelli, J.W. Corbett: Phys. Status Solidi (a)91, K49 (1985)

    Google Scholar 

  89. P. Wagner, R. Oeder, W. Zulehner: Appl. Phys. A46, 73 (1988)

    Google Scholar 

  90. P. Clauws, J. Vennik: In Ref. [23] p. 941

    Google Scholar 

  91. A. Bourret: In Ref. [32] p. 129

    Google Scholar 

  92. J. Robertson, A. Ourmazd: Appl. Phys. Lett.46, 559 (1985)

    Google Scholar 

  93. G.G. De Leo, W.B. Fowler, G.D. Watkins: Phys. Rev. B29, 3193 (1984)

    Google Scholar 

  94. L.C. Snyder, J.W. Corbett: In Ref. [5] p. 207

    Google Scholar 

  95. J.T. Borenstein, J.W. Corbett: In Ref. [5] p. 159

    Google Scholar 

  96. C.S. Chen, D.K. Schroder: J. Appl. Phys.63, 5761 (1988)

    Google Scholar 

  97. V.M.S. Gomes, J.R. Leite: Appl. Phys. Lett.47, 824 (1985)

    Google Scholar 

  98. P.J. Kelly: To be published

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Wagner, P., Hage, J. Thermal double donors in silicon. Appl. Phys. A 49, 123–138 (1989). https://doi.org/10.1007/BF00616290

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00616290

PACS

Navigation