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A simple technique to deposit molybdenum thin films

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Abstract

A simple technique is proposed for metallizing nonconductive objects. The technique, which is based on a plasma-induced dissociation of Mo(CO)6 molecules, is inexpensive with no sophisticated instrument needed, and allows us to deposit fine grained, adherent thin films of molybdenum on nonrefractory substrates. It is believed that the technique possesses a variety of potential applications in laboratory works.

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Okuyama, F. A simple technique to deposit molybdenum thin films. Appl. Phys. A 28, 125–128 (1982). https://doi.org/10.1007/BF00617143

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  • DOI: https://doi.org/10.1007/BF00617143

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