Abstract
Polycrystalline Ni has been grown by decomposition of Ni(CO)4 using different wavelengths of the visible radiation of a Kr+ laser. The influence of laser irradiance, substrate material and scanning velocity on deposition rate and widths of patterns has been investigated. The deposition rates achieved are typically several μm/s, and the lateral dimensions of the deposits can be as small as 1 μm.
Article PDF
Similar content being viewed by others
References
For a review see e.g.: D. Bäuerle: InLaser Diagnostics and Photochemical Processing for Semiconductor Devices, ed. by R. M. Osgood, S. R. J. Brueck (North-Holland, New York 1983)
G. Leyendecker, D. Bäuerle, P. Geittner, H. Lydtin: Appl. Phys. Lett.39, 921 (1981)
D. Bäuerle, G. Leyendecker, P. Geittner, H. Lydtin: Appl. Phys. B28, 267 (1982)
G. Leyendecker, H. Noll, D. Bäuerle, P. Geittner, H. Lydtin: J. Electrochem. Soc.130, 157 (1983)
D.J. Ehrlich, R.M. Osgood, T.F. Deutsch: Appl. Phys. Lett.39, 957 (1981)
D. Bäuerle, P. Irsigler, G. Leyendecker, H. Noll, D. Wagner: Appl. Phys. Lett.40, 819 (1982)
Y. Rytz-Froidevaux, R. P. Salathé, H. H. Gilgen, H. P. Weber: Appl. Phys. A27, 133 (1982)
S. D. Allen, M. Bass: J. Vac. Sci. Technol.16, 431 (1979)
M. J. McCreary: In Proc. 5th Int. Conf. on Chemical Vapor Deposition, ed. by J. M. Blocher et al. (Buckinghamshiré 1975) pp. 714–725