Abstract
The interface properties of hydrogenated amorphous carbon films (a-C:H) on Si and GaAs substrates have been studied by in-situ photoelectron spectroscopy measurements. The a-C:H films have been deposited by direct ion beam deposition. Distinct differences in the interface formation have been observed during film depositon on the two substrates. The data clearly reveal a decomposition of the GaAs at the interface which can be related to the reduced adhesion of a-C: H on the compound semiconductor substrate.
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References
A.M. Lettington: InAmorphous Hydrogenated Carbon Films, ed. by P. Koidl, P. Oelhafen (Les editions de Physique, Les Ulis, France 1987) p. 359
H.-C. Tsai, D.B. Bogy: J. Vac. Sci. Technol. A5, 3287 (1987)
C. Weissmantel: In [ref. 1], p. 49
C. Wild, P. Koidl, J. Wagner: In [ref. 1], p. 137
N. Savvides: In [ref. 1] p, 275
B. Dischler, A. Bubenzer, P. Koidl: Solid State Commun.48, 105 (1983)
J. Wagner, M. Ramsteiner, C. Wild, P. Koidl: In [ref. 1], p. 219
R.W. Collins: Appl. Phys. Lett.52, 2025 (1988)
Ch. Wild, P. Koidl: Appl. Phys. Lett.51, 1506 (1987)
P. Oelhafen, D. Ugolini: In [ref. 1], p. 267
D. Ugolini, P. Oelhafen, M. Wittmer: In [ref. 1], p. 287
D. Ugolini, P. Oelhafen, M. Wittmer: In [ref. 1], p. 297
J.C. Angus: In [ref. 1], p. 167
D. Ugolini, J. Eitle, P. Oelhafen: To be published
D. Ugolini, P. Oelhafen: Unpublished results
M. Wittmer, D. Ugolini, J. Eitle, P. Oelhafen: Part II of present paper. Appl. Phys. A48, 559–566 (1989)
P. Oelhafen: InAmorphous and Liquid Material, ed. by E. Lüscher, G. Fritsch, G. Jacucci, NATO SAI series E: Applied Sciences-No. 118 (Martinus Nijhoff Publishers 1987)
M.P. Seah, W.A. Dench: Surf. Interf. Anal.1, 1 (1979)
L. Ley, R.A. Pollak, F.R. McFeely, S.D. Kowalczyk, D.A. Shirley: Phys. Rev. B9, 600 (1974)
J.H. Scofield: J. Electron. Spectr. Rel. Phen.8, 129 (1976)
W. Ranke, K. Jacobi: Prog. Surf. Sci.10, 1 (1981) and references therein
J.J. Yeh, I. Lindau: Atom. Data Nucl. Data Tables32, 1 (1985)
S.P. Kowalczyk: Ph. D. Thesis, University of California, Berkley (1976) (unpublished)
M.K. Bahl, R.D. Woodall, R.L. Watson, K.J. Irgolic: J. Chem. Phys.64, 1210 (1976); E.D. Roberts, P. Weightman, C.E. Johnson: J. Phys. C: Solid State Phys.8, 1301 (1975)
F.A. Shunk:Constitution of Binary Alloys (McGraw-Hill, New York 1985) p. 49
M.G. Crescenzi, P. Picozzi, S. Santucci, C. Battistoni, G. Mattogo: Solid State Commun.51, 811 (1981)
M.G. Mason: Phys. Rev. B27, 748 (1983)