Skip to main content
Log in

Chemical vapour deposition of diamond in RF glow discharge

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

References

  1. B. V. SPITYN, L. L. BOUILOV and B. V. DERJAGUIN,J. Cryst. Growth 52 (1981) 219.

    Google Scholar 

  2. R. MANIA, L. STOBIERSKI and R. PAMPUCH,Cryst. Res. Technol. 16 (1981) 785.

    Google Scholar 

  3. S. MATSUMOTO, Y. SATO, M. KAMO and N. SETAKA,Jpn. J. Appl. Phys. 21 (1982) L183.

  4. S. MATSUMOTO, Y. SATO, M. TSUTSUMI and N. SETAKA,J. Mater. Sci. 17 (1982) 3106.

    Google Scholar 

  5. M. KAMO, Y. SATO, M. MATSUMOTO and N. SETAKA,J. Cryst. Growth 62 (1983) 642.

    Google Scholar 

  6. K. KIJIMA, S. MATSUMOTO and N. SETAKA, Proceedings of the International Ion Engineering Congress (1983) p. 1417.

  7. M. KONUMA and O. MATSUMOTO,J. Less-Common Met. 52 (1977) 145.

    Google Scholar 

  8. S. MATSUMOTO, Y. SATO, M. KAMO, J. TANAKA and N. SETAKA, Proceedings of the 7th International Conference on Vacuum Metallurgy (1982) p. 386.

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Matsumoto, S. Chemical vapour deposition of diamond in RF glow discharge. J Mater Sci Lett 4, 600–602 (1985). https://doi.org/10.1007/BF00720043

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00720043

Keywords

Navigation