Abstract
The development of excimers and excimer lasers are reviewed. The excimers of the noble gases (Xe *2 , Kr *2 , Ar *2 ) and of the noble gas halides (e.g. KrF, XeCl) which, respectively, radiate in the vacuum ultra-violet and ultra-violet regions of the spectrum are described in terms of their structure, spectroscopy and formation kinetics and the methods of pumping, operational characteristics and applications of the lasers are discussed.
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