Abstract
Ion-beam mixing in Al-Pd, Al-Cr, Pd-Cu, Ag-Cu and Ag-Fe bilayers has been studied using Rutherford backscattering spectroscopy (RBS) and Auger electron spectroscopy (AES) over an ion dose range between 1 × 1015 and 1 × 1016 Ar+ cm−2 at room temperature. RBS and AES results show that the mixing efficiency of the light elements is higher than that of the heavy elements. The mixing efficiency of a heavy element is independent of the heat of mixing energy, while that of a light element has a close relation with the heat of mixing. The experimental results are discussed in terms of cascade mixing and thermal spike mixing.
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References
B. X. Liu,Phys. Status Solidi (a)94 (1986) 11.
W. Xia, M. Fernandes, C. A. Hewett, S. S. Lau, D. B. Poker andJ. P. Biersack,Nucl. Instrum. Meth. B37/38 (1988) 408.
B. Rauschenbach, M. Possert andR. Kuchler,Appl. Phys. A48 (1987) 347.
K. Tao, C. A. Hewett, S. S. Lau, Ch. Buchal andD. B. Poker,Appl. Phys. Lett. 50 (1987) 1343.
R. J. Smith, C. N. Whang, Xu Mingde, M. Worthington, C. Hennessey, M. Kim andM. Holland,Rev. Sci. Instrum. 58 (1987) 2284.
L. R. Doolitle,Nucl. Instrum. Meth. B15 (1986) 227.
S. Hofmann, in “Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy”, edited by D. Briggs and M. P. Seah (Wiley, Chichester, 1983) p. 141.
P. G. Shewmon, in “Diffusion in Solids” (McGraw-Hill, New York, 1963) Ch. 1.
D. Peak andR. S. Averback,Nucl. Instrum. Meth. B7/8 (1985) 561.
B. M. Paine andR. S. Averback,ibid. B7/8 (1985) 666.
M. W. Guinan andJ. H. Kinney,J. Nucl. Mater. 103/104 (1981) 1319.
J. P. Biersack,Nucl. Instrum. Meth. B19/20 (1987) 32.
J. F. Ziegler, J. P. Biersack andU. Littmark, “The Stopping and Range of Ions in Solids” (Pergamon, New York. 1985).
K. Hohmuth, V. Heera andB. Rauschenbach,Nucl. Instrum. Meth. B39 (1989) 136.
A. D. Marwich, in “Surface Modification and Alloying”, edited by J. M. Poate, G. Foti and D. C. Jacobson (Plenum, New York 1983) p. 199.
R. Hultgren, in “Selected Values of the Thermodynamic Properties of Binary Alloys” (American Society for Metals, Ohio, 1973) p. 199.
P. Sigmund andA. Gras-Marti,Nucl. Instrum. Meth. 182/183 (1981) 25.
H. H. Andersen,Appl. Phys. 48 (1979) 3383.
W. L. Johnson, Y. T. Cheng, M. van Rossum andM. A. Nicolet,Nucl. Instrum. Meth. B7/8 (1985) 657.
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Kim, S.O., Song, J.H., Jang, H.G. et al. Ar+-induced mixing mechanisms in metal-metal bilayer systems. J Mater Sci 27, 2141–2146 (1992). https://doi.org/10.1007/BF01117928
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DOI: https://doi.org/10.1007/BF01117928