Skip to main content
Log in

Sensor diaphragm under initial tension: Linear analysis

  • Published:
Experimental Mechanics Aims and scope Submit manuscript

Abstract

In this paper, we present recent efforts conducted to investigate the dynamic behavior of a sensor diaphragm under initial tension. A comprehensive mechanics model based on a plate with in-plane tension is presented and analyzed to examine the transition from plate behavior to membrane behavior. It is shown that for certain tension parameter values, it is appropriate to model the diaphragm as a plate-membrane structure rather than as a membrane. The model predictions are found to compare well with experimental results. The analysis and results should be valuable for carrying out the design of circular sensor diaphragms for various applications.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. Matsuoka, Y., Yamamoto, Y., Tanabe, M., Shimada, S., Yamada, K., Yasukawa, A., andMatsuzaka, H., “Low-pressure Measurement Limits for Silicon Piezoresistive Circular Diaphragm Sensors,”Journal of Micromechanics and Microengineering,5,32–35 (1995).

    Article  Google Scholar 

  2. Pedersen, M., Meijerink, M.G.H., Olthuis, W., andBergveld, P., “A Capacitive Differential Pressure Sensor with Polyimide Diaphragm,”Journal of Micromechanics and Microengineering,7,250–252 (1997).

    Article  Google Scholar 

  3. Xiao, Z., Engström, O., andVidovic, N., “Diaphragm Deflection of Silicon Interferometer Structures Used as Pressure Sensors,”Sensors and Actuators A,58,99–107 (1997).

    Article  Google Scholar 

  4. Zeng, N., Shi, C., Wang, D., Zhang, M., andLiao, Y., “Diaphragm-type Fiber-optic Interferometric Acoustic Sensor,”Optical Engineering,42, (9),2558–2562 (2003).

    Article  Google Scholar 

  5. Yu, M., “Fiber-optic Sensor Systems for Acoustic Measurements,” Ph.D. Dissertation,University of Maryland, College Park, MD (2002).

    Google Scholar 

  6. Yu, M. andBalachandran, B., “Acoustic Measurements Using a Fiberoptic Sensor System,”Journal of Intelligent Material Systems and Structures,14 (7),409–414 (2003).

    Article  Google Scholar 

  7. Zuckerwar, A.J., “Theoretical Response of Condenser Microphone,”Journal of the Acoustical Society of America,64,1278–1285 (1978).

    Article  Google Scholar 

  8. Sheplak, M. andDugundji, J., “Large Deflections of Clamped Circular Plates under Initial Tension and Transitions to Membrane Behavior,”ASME Journal of Applied Mechanics,65 (1),107–115 (1998).

    Article  Google Scholar 

  9. Soedel, W., Vibrations of Shells and Plates, Marcel Dekker, New York (1993).

    MATH  Google Scholar 

  10. Mansfield, E.H., The Bending and Stretching of Plates, Pergamon Press, New York (1964).

    MATH  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Yu, M., Balachandran, B. Sensor diaphragm under initial tension: Linear analysis. Experimental Mechanics 45, 123–129 (2005). https://doi.org/10.1007/BF02428184

Download citation

  • Received:

  • Revised:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF02428184

Key Words

Navigation