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Preparation and characterization of metallorganic chemical vapour deposited LixMoyOz using a single source solid precursor

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Abstract

Thin films of LixMoyOz have been deposited on glass substrate in a one step chemical vapour deposition using a single source solid precursor. The films were characterized using Rutherford Backscattering Spectroscopy (RBS), X-Ray Diffractometry, Scanning Electron Microscopy (SEM), Impedance Spectroscopy (IS), van der Pauw conductivity measurement and Ultraviolet-Visible Spectroscopy. Results of the characterization showed that the films are dendritic, polycrystalline and semiconducting with an optical transition energy of 3.0 eV. IS characterization gave a semicircle in the complex impedance plot. The conductivity vs. temperature plot showed a transition at 450 °C and also a hysteresis. Analysis showed the film to be mixture of phases.

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Authors and Affiliations

  1. Department of Electronic and Electrical Engineering, Obafemi Awolowo University, Ile-Ife, Nigeria

    O. O. Ilori, O. Osasona & G. A. Adegboyega

  2. Department of Physics, Obafemi Awolowo University, Ile-Ife, Nigeria

    M. A. Eleruja & E. O. B. Ajayi

  3. Department of Chemistry, Obafemi Awolowo University, Ile-Ife, Nigeria

    G. O. Egharevba

  4. IENI-CNR, University of Pavia, c/o Dipartimento di Chimica Fisica, viale Taramelli 16, 27100, Pavia, Italy

    G. Chiodelli

  5. Department of Electronic and Electrical Engineering, University of Surrey, GU2 7XH, Guildford, Surrey, UK

    G. Boudreault & C. Jeynes

Authors
  1. O. O. Ilori
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  2. O. Osasona
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  3. M. A. Eleruja
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  4. G. O. Egharevba
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  5. G. A. Adegboyega
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  6. G. Chiodelli
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  7. G. Boudreault
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  8. C. Jeynes
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  9. E. O. B. Ajayi
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Correspondence to E. O. B. Ajayi.

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Ilori, O.O., Osasona, O., Eleruja, M.A. et al. Preparation and characterization of metallorganic chemical vapour deposited LixMoyOz using a single source solid precursor. Ionics 11, 387–392 (2005). https://doi.org/10.1007/BF02430252

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  • DOI: https://doi.org/10.1007/BF02430252

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