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Formation of lithium niobate-tantalate waveguides

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Abstract

Low loss diffused lithium niobate-tantalate waveguides exhibiting strong electrooptic coefficients have been made by a simple processing procedure. The formation of these waveguides takes place by the conversion of a Nb metal film to Nb oxide at a low temperature, followed by diffusion of Nb into the LiTaO3 substrate at about 1100°C. The diffused layer has a Gaussxan composition profile. Its measured refractive index is consistent with that calculated by interpolation between the indices of LiNbO3, and LiTaO3.

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Authors and Affiliations

  1. RCA Laboratories, 08540, Princeton, New Jersey

    W. Phillips & J. M. Hammer

Authors
  1. W. Phillips
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  2. J. M. Hammer
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Additional information

The research reported in this paper was jointly sponsored by the Office of Naval Research, Arlington, Virginia and RCA Laboratories, Princeton, New Jersey.

This paper is based on a presentation at the Conference on Preparation and Properties of Electronic Materials, Boston, Massachusetts, September 1974.

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Phillips, W., Hammer, J.M. Formation of lithium niobate-tantalate waveguides. J. Electron. Mater. 4, 549–565 (1975). https://doi.org/10.1007/BF02666235

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  • DOI: https://doi.org/10.1007/BF02666235

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