Abstract
Hydrogen is readily incorporated into GaN and related alloys during wet and dry etching, chemical vapor deposition of dielectric overlayers, boiling in water, and other process steps, in addition to its effects during metalorganic chemical vapor deposition or metalorganic molecular beam epitaxial growth. The hydrogen is bound at defects or impurities and passivates their electrical activity. Reactivation of passivated shallow donors in the nitrides occurs at 450-550°C, but evolution from the crystal requires much higher temperatures (≥800°C for GaN).
Similar content being viewed by others
References
S.J. Pearton, J.W. Corbett and M. Stavola,Hydrogen in Crystalline Semiconductors (Heidelberg: Springer-Verlag, 1992).
S. Nakamura, T. Mukai, M. Senoh and N. Iwasa,Jpn. J.Appl. Phys. 31, L139 (1992).
M. Stavola,Mater. Sci. Forum 148/149, 251 (1994).
S.K. Estreicher,Mater. Sci. Eng. R 14, 319 (1995).
Hydrogen in Compound Semiconductors, ed. S.J. Pearton (Switzerland: Trans-Tech Publications, 1994).
C.R. Abernathy,J. Vac. Sci. Technol. A 11, 869 (1993).
S.J. Pearton, C.R. Abernathy, P. Wisk, W.S. Hobson and F. Ren,Appl. Phys. Lett. 63, 1143 (1993).
J.M. Zavada, R.G. Wilson, C.R. Abernathy and S.J. Pearton,Appl. Phys. Lett. 64, 2724 (1994).
R.J. Shul, S.P. Kilcoyne, M. Hagerott-Crawford, J.E. Parmeter, C.B. Vartuli, C.R. Abernathy and S.J. Pearton,Appl. Phys. Lett. 66, 1761 (1995).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Pearton, S.J., Shul, R.J., Wilson, R.G. et al. The incorporation of hydrogen into III-V nitrides during processing. J. Electron. Mater. 25, 845–849 (1996). https://doi.org/10.1007/BF02666647
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1007/BF02666647