Abstract
We present the effects of both deposition temperature and deposition time on the surface characteristics of TiN-coated high-speed steel(AISI M2) by arc ion plating. The microparticles, surface roughness, microhardness, coated layer thickness, adhesion strength, and atomic distribution of Ti, N, and Fe elements were measured for various deposition temperatures and times. The results demonstrated that a deposition temperature in the range of 400 to 500 °C had a slight influence on the surface characteristics, while a deposition time in the range of 10 to 180 min had a great influence on the microparticles, surface roughness, microhardness, coated thickness, atomic distribution of Ti, and adhesion strength.
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Ben Rabeh, M., Zribi, M., Kanzari, M., Rezig, B., 2005, “Structural and Optical Characterization of Sn Incorporation in CuInS2 Thin Films Grown by Vacuum Evaporation Method,”Int. J. of Materials Letters, Vol. 59, pp. 3164–3168.
Boxman, R. L., Martin, P. J., Sanders, D. M., 1995, “Handbook of Vacuum Arc Science and Technol. Noyes Publications,”Park Ridge, NJ, pp. 367.
Choi, S. R., Park, I. W., Park, J. H., Kim, K. H., 2004. “Influence of Substrate Bias Voltage on Deposition Behavior and Micro-Indentation Hardness of Ti-Si-N Coatings by a Hybrid Coating System of Arc Ion Plating and Sputtering Techniques,”Int. J. of Surface and Coa-tings Technology, Vol. 179, pp. 89–94.
Cselle, T., Barimani, A., 1995, “Today’s Applications and Future Developments of Coatings for Drills and Rotating Cutting Tools,”Int. J. of Surface and Coatings Technology, Vol. 76-77, pp. 712–718.
Freller, H., Haessler, H., 1988, “Evaluation of Existing Ion Plating Processes for the Deposition of Multicomponent Hard Coatings,”Int. J. of Surface and Coatings Technology, Vol. 36, pp. 219–232.
Håkansson, G., Hultman, L., Sundgren, J. E., Greene, J. E., Münz, W. D., 1991, “Microstructures of TiN Films Grown by Various Physical Vapour Deposition Techniques,”Int. J. of Surface and Coatings Technology, Vol. 48, pp. 51–67.
Hatto, P. W., Teer, D. G., 1986, “Ion Plating with an Arc Source,”Int. J. of Vacuum, Vol. 36, pp. 67–69.
Hu, J. C., Chang, T. C., Chen, L. J., Yang, Y. L., Chang, C. Y., 1998, “Characterization of Multilayered Ti/TiN Films Grown by Chemical Vapor Deposition,”Int. J. of Thin Solid Films, Vol. 332, pp. 423–427.
Ichimura, H., Rodrigo, A., 2000, “The Correlation of Scratch Adhesion with Composite Hardness for TiN Coatings,”Int. J. of surface and Coatings Technology, Vol. 126, pp. 152–158.
Tai, C.N., Koh, E.S. and Akari, K., 1990 “Macroparticles on TiN films prepared by the arc ion plating process,”Int. J. of Surface and Coatings Technology, Vol. 43-44, pp. 324–333
Jiménez, C., Madar, R., Gilles, S., Bernard, C., 1995, “Deposition of TiN Thin Films by Organometallic Chemical Vapor Deposition: Thermodynamical Predictions and Experimental Results,”Int. J. of Surface and Coatings Technology, Vol. 76-77, pp. 237–243.
Jindal, P. C., Santhanam, A. T., Schleinkofer, U., Sinister, A. F., 1999, “Performance of PVD TiN, TiCN, and TiAIN Coated Cemented Carbide Tools in Turning,”Int. J. of Refractory Metals and Hard Materials, Vol. 17, pp. 163–170.
Kadlec, S., Maek, M., Wouters, S., Meert, B., Navinek, B., Panjan, P., Quaeyhaegens, C., Stals, L. M., 1999, “Plasma Diagnostics of Triode Ion-Plating Systems by Energy-Resolved Mass Spectroscopy and Comparison of TiN Film Properties,”Int. J. of Surface and Coatings Technology, Vol. 116-119, pp. 1211–1218.
Kadlec, S., Musil, I., Vyskocil, Ji., 1992, “Growth and Properties of Hard Coatings Prepared by Physical Vapor Deposition Methods,”Int. J. of Surface and Coatings Technology, Vol. 54-55, pp. 287–296.
Kim, S. W., 2004, “Consideration on the Evaluation of Adhesion Force of Thin Film with Rockwell and Scratch Tester,”J. of the Korean Society for Heat Treatment, Vol. 17, pp. 365–369.
Kim, J. S., 2001, “Tendency of PVD Coating Technology on Metal Cutting Tools,”J. of the Korean Society of Precision Engineering, Vol. 18, pp. 11–17.
Lang, F., Yu, Z., 2001, “The Corrosion Resistance and Wear Resistance of Thick TiN Coatings Deposited by Arc Ion Plating,”Int. J. of. Surface and Coatings Technology, Vol. 145, pp. 80–87.
Ma, S., Xu, K., He, J., 2001,”Parametric Effects of Residual Stress in Pulsed d.c. Plasma Enhanced CVD TiN Coatings,” Int. J. ofSurface and Coatings Technology, Vol. 142-144, 2001, pp. 1023–1027.
Maek, M., Navinek, B., Panjan, P., Kadlec, S., Wouters, S., Quaeyhaegens, C., Stals, L. M., 1999, “Energy and Mass Spectroscopy Studies During Triode Ion Plating of TiN Films in Two Different Layouts,” Int.J. of Surface and Coatings Technology, Vol. 113, pp. 149–156.
Matsue, T., Hanabusa, T., Ikeuchi, Y., 2004, “Dependence to Processing Conditions of Structure in TiN Films Deposited by Arc Ion Plating,”Int. J. of Vacuum, Vol. 74, pp. 647–651.
Matsue, T., Hanabusa, T., Miki, Y., Kusaka, K., Maitani, E., 1999, “Residual Stress in TiN Film Deposited by Arc Ion Plating,”Int. J. of Thin Solid Films, Vol. 343-344, pp. 257–260.
Oh, S. M., Rhee, B. G., Jeong, B. S., 2003, “Wear Behaviors of Ceramics TIN, TIC and TICN with Arc Ion Plating,”KSME International Journal, Vol. 17, No. 12, pp. 1904–1911.
Ohta, H., Takamoto, T., Yasuda, T., Furukawa, S., 2006, “Optical and Electrical Properties of Poly (Dimethyl Silane) Thin Films Prepared by Vacuum Evaporation Technique,”Int. J. of Thin Solid Films, Vol. 499, pp. 129–134.
Ouyang, J. H., Sasaki, S., 2004, “The Friction and Wear Characteristics of Cathodic Arc Ion-Plated (V, Ti) N Coatings in Sliding Against Alumina Ball,”Int. J. of Wear, Vol. 257, pp. 708–720.
Tai, C. N., Koh, E. S., Akari, K., 1990 “Macroparticles on TiN Films Prepared by the Arc Ion Plating Process,”Int. J. of Surface and Coatings Technology, Vol. 43-44, pp. 324–335.
Yoon, J. S., Myung, H. S., Han, J. G., Musil, J., 2000, “A Study on the Synthesis and Microstructure of WC-TiN Superlattice Coating,”Int. J. of Surface and Coatings Technology, Vol. 131, pp. 372–377.
Yoon, S. Y., Yoon, S. Y., Chung, W. S., Kim, K. H., 2004, “Impact-Wear Behaviors of TiN and Ti-Al-N Coatings on AISID2 Steel and WC-Co Substrates,”Int. J. of. Surface and Coatings Technology, Vol. 177-178, pp. 645–650.
Yoon, S. Y., Lee, K. O., Kang, S. S., Kim, K. H., 2002, “Comparison for Mechanical Properties Between TiN and TiAIN Coating Layers by AIP Technique,”Int. J. of Materials Processing Technology, Vol. 130-131, pp. 260–265.
Yun, J. Y., Rhee, S. W., 1998, “Effect of H2 and N2 in the Remote Plasma Enhanced Metal Organic Chemical Vapor Deposition of TiN from Tetrakis-Diethyl-Amidotitanium,”Thin Solid Films, Vol. 312, pp. 24–26.
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Kim, H.J., Joun, M.S. Effects of deposition temperature and time on the surface characteristics of TiN-coated high-speed steel by arc ion plating. J Mech Sci Technol 21, 575–584 (2007). https://doi.org/10.1007/BF03026961
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DOI: https://doi.org/10.1007/BF03026961