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A soft moulding process for manufacture of net-shape ceramic microcomponents

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Abstract

A soft moulding process for manufacture of ceramic microcomponents, alumina and Al2O3/SiC composite, is introduced in this paper. The process involves fabrication of SU-8 master moulds and production of mirrored polydimethysiloxane (PDMS) soft moulds. Green parts are formed in the PDMS moulds by filling the ceramic slurry into the soft moulds and net-shape green components are obtained after demoulding. The methods for the mould filling using different suspensions were demonstrated: one was aqueous suspension for alumina microcomponent and another was non-aqueous suspension for Al2O3/SiC microcomponent. The measurements showed that the proposed soft lithography process is successful in producing ceramic microcomponents and retaining the fine features in micron scale.

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Authors and Affiliations

  1. School of Mechanical Engineering, University of Birmingham, Birmingham, B15 2TT, UK

    Zhigang Zhu, Hany Hassanin & Kyle Jiang

  2. School of Materials Sciences & Engineering, Jingdezhen Ceramic Institute, Jingdezhen, 333001, China

    Zhigang Zhu

Authors
  1. Zhigang Zhu
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  2. Hany Hassanin
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  3. Kyle Jiang
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Correspondence to Kyle Jiang.

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Zhu, Z., Hassanin, H. & Jiang, K. A soft moulding process for manufacture of net-shape ceramic microcomponents. Int J Adv Manuf Technol 47, 147–152 (2010). https://doi.org/10.1007/s00170-008-1864-z

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  • DOI: https://doi.org/10.1007/s00170-008-1864-z

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