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Design and optimization of a high temperature microheater for inkjet deposition

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Abstract

Inkjet deposition has become a promising additive manufacturing technique due to its fast printing speed, scalability, wide choice of materials, and compatibility for multi-material printing. Among many different inkjet techniques, thermal inkjet, led by Hewlett-Packard and Canon, is the most successful inkjet technique that uses a microheater to produce a pressure pulse for ejecting droplets by vaporizing the ink materials in a timespan of microseconds. Thermal inkjet has been widely adopted in many commercial 3D inkjet printers (e.g., 3D Systems ProJet X60 series) due to its low cost, high resolution, and easy operation. However, the viscosity of the printable materials has been limited to less than 40 cP due to insufficient energy provided inside the nozzle to overcome the viscous dissipation of energy. This paper presents a study on the design and optimization of a high temperature microheater with a target heating temperature of more than 600 °C (compared to ~300 °C for current printhead) to increase the energy supply to the nozzle. The benefits are fourfold: (1) higher temperature will lead to faster vaporization of ink and thus higher jetting frequency and print speed, (2) higher temperature will make it possible for jetting materials with higher boiling points, (3) higher temperature will reduce the viscosity of the ink and thus the viscous dissipation of energy, and (4) higher energy supply will increase the magnitude of the pressure pulse for printing more viscous materials. In this paper, a high-temperature microheater was designed with the following objectives: to reduce thermal stress in heaters and to minimize uneven heat distribution. A literature survey was first conducted on design, fabrication, and operation of thin-film resistive microheaters. A multiphysics numerical model was then developed to simulate electrical, thermal, and mechanical responses of the microheater. The model was validated by comparison to experimental data and existing models obtained from literature. With proper parameterization of the design geometry, the geometry of the microheater is optimized using a particle swarm optimization method. Results show the optimized high-temperature microheater successfully operates at temperatures in excess of 600 °C. The design optimization enabled better characteristics for even heat distribution and minimizing stress. The design approach can serve as a fundamental means of design optimization for microheaters.

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References

  1. Setti L, Piana C, Bonazzi S, Ballarin B, Frascaro D, Fraleoni-Morgera A, Giuliani S (2004) Thermal inkjet technology for the microdeposition of biological molecules as a viable route for the realization of biosensors. Anal Lett 37:1559–1570

    Article  Google Scholar 

  2. Zhou W (2014) “Interface dynamics in inkjet deposition”.

  3. Ali SZ, Udrea F, Milne WI, Gardner JW (2008) Tungsten-based SOI microhotplates for smart gas sensors. Microelectromechanical Syst J 17:1408–1417

    Article  Google Scholar 

  4. Lacy F (2007) “Investigating thin films for use as temperature sensors,” in Proceedings of the world congress on engineering & computer science, pp. 441–444.

  5. Mele L, Santagata F, Iervolino E, Mihailovic M, Rossi T, Tran A, Schellevis H, Creemer J, Sarro P (2012) A molybdenum MEMS microhotplate for high-temperature operation. Sensors Actuators A Phys 188:173–180

    Article  Google Scholar 

  6. Pike A, Gardner JW (1997) Thermal modelling and characterisation of micropower chemoresistive silicon sensors. Sensors Actuators B Chem 45:19–26

    Article  Google Scholar 

  7. Semancik S, Cavicchi R, Wheeler M, Tiffany J, Poirier G, Walton R, Suehle J, Panchapakesan B, DeVoe D (2001) Microhotplate platforms for chemical sensor research. Sensors Actuators B Chem 77:579–591

    Article  Google Scholar 

  8. Spannhake J, Helwig A, Müller G, Faglia G, Sberveglieri G, Doll T, Wassner T, Eickhoff M (2007) SnO 2: Sb—a new material for high-temperature MEMS heater applications: performance and limitations. Sensors Actuators B Chem 124:421–428

    Article  Google Scholar 

  9. Toskov S, Glatz R, Miskovic G and Radosavljevic G (2013) “Modeling and fabrication of pt micro-heaters built on alumina substrate,” in Electronics technology (ISSE), 2013 36th international spring seminar on, pp. 47–52.

  10. Zhang K, Chou S, Ang S (2007) Fabrication, modeling and testing of a thin film Au/Ti microheater. Int J Therm Sci 46:580–588

    Article  Google Scholar 

  11. Lee S, Dyer D, Gardner J (2003) Design and optimisation of a high-temperature silicon micro-hotplate for nanoporous palladium pellistors. Microelectron J 34:115–126

    Article  Google Scholar 

  12. Velmathi G, Ramshanker N and Mohan S (2010) “Design, electro-thermal simulation and geometrical optimization of double spiral shaped microheater on a suspended membrane for gas sensing,” in IECON 2010-36th Annual conference on IEEE industrial electronics society, pp. 1258–1262.

  13. Zhang X, Grigoropoulos CP (1995) Thermal conductivity and diffusivity of free‐standing silicon nitride thin films. Rev Sci Instrum 66:1115–1120

    Article  Google Scholar 

  14. Creemer J, Briand D, Zandbergen H, Van der Vlist W, de Boer C, de Rooij NF, Sarro P (2008) Microhotplates with TiN heaters. Sensors Actuators A Phys 148:416–421

    Article  Google Scholar 

  15. James Prescoot Joule. Available: http://www.sciencemuseum.org.uk/onlinestuff/people/james%20prescott%20joule.aspx.

  16. Timeline of Our History. Available: http://www8.hp.com/us/en/hp-information/about-hp/history/hp-timeline/timeline.html.

  17. Tiggelaar RM (2004) “Silicon-technology based microreactors for high-temperature heterogeneous partial oxidation reactions”.

  18. Kim YS (2006) Microheater-integrated single gas sensor array chip fabricated on flexible polyimide substrate. Sensors Actuators B Chem 114:410–417

    Article  Google Scholar 

  19. Maeder T, Sagalowicz L, Muralt P (1998) Stabilized platinum electrodes for ferroelectric film deposition using Ti, Ta and Zr adhesion layers. Jpn J Appl Phys 37:2007–2012

    Article  Google Scholar 

  20. Bradley D, Entwistle A (1961) Determination of the emissivity, for total radiation, of small diameter platinum-10% rhodium wires in the temperature range 600–1450 C. Br J Appl Phys 12:708

    Article  Google Scholar 

  21. Gordillo G, Mesa F, Calderón C (2006) Electrical and morphological properties of low resistivity Mo thin films prepared by magnetron sputtering. Braz J Phys 36:982–985

    Article  Google Scholar 

  22. Chopra KL (1969) “Thin film phenomena”

  23. Demirci T, Guney D, Bozkurt A and Gurbuz Y (2001) “Electro-thermal simulations and modelling of micromachined gas sensor,” in Microelectromechanical Systems Conference, pp. 99–102.

  24. Rossi C, Temple-Boyer P, Estève D (1998) Realization and performance of thin SiO 2/SiN x membrane for microheater applications. Sensors Actuators A Phys 64:241–245

    Article  Google Scholar 

  25. Zhang K, Rossi C, Petrantoni M, Mauran N (2008) A nano initiator realized by integrating Al/CuO-based nanoenergetic materials with a Au/Pt/Cr microheater. Microelectromechanical Syst J 17:832–836

    Article  Google Scholar 

  26. Srinivasan R, Hsing I, Berger PE, Jensen KF, Firebaugh SL, Schmidt MA, Harold MP, Lerou JJ, Ryley JF (1997) Micromachined reactors for catalytic partial oxidation reactions. AIChE J 43:3059–3069

    Article  Google Scholar 

  27. Belser RB, Hicklin WH (1959) Temperature coefficients of resistance of metallic films in the temperature range 25 to 600 C. J Appl Phys 30:313–322

    Article  Google Scholar 

  28. Mo Y, Okawa Y, Inoue K, Natukawa K (2002) Low-voltage and low-power optimization of micro-heater and its on-chip drive circuitry for gas sensor array. Sensors Actuators A Phys 100:94–101

    Article  Google Scholar 

  29. Eberhart RC and KennedyJ (1995) “A new optimizer using particle swarm theory,” in Proceedings of the sixth international symposium on micro machine and human science, pp. 39–43.

  30. Poli R (2007) “An analysis of publications on particle swarm optimization applications”.

  31. Venter G, Sobieszczanski-Sobieski J (2003) Particle swarm optimization. AIAA J 41:1583–1589

    Article  Google Scholar 

  32. Trelea IC (2003) The particle swarm optimization algorithm: convergence analysis and parameter selection. Inf Process Lett 85:317–325

    Article  MathSciNet  MATH  Google Scholar 

  33. Kantha B, Sarkar SK (2015) Comparative study of particle swarm optimization and genetic algorithm for the optimization of system parameters of MEMS based micro-heater. J Comput Theor Nanosci 12:1641–1646

    Article  Google Scholar 

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Correspondence to Wenchao Zhou.

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VanHorn, A., Zhou, W. Design and optimization of a high temperature microheater for inkjet deposition. Int J Adv Manuf Technol 86, 3101–3111 (2016). https://doi.org/10.1007/s00170-016-8440-8

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