Skip to main content
Log in

Wettability and reactivity of molten silicon with various substrates

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Contact angles of molten silicon on various substrates have been determined using the sessile drop method and reactivity has been investigated by examining cross sections between silicon and substrates with an electron-probe microanalyzer (EPMA). The contact angles between molten silicon and oxide substrates, such as SiO2(s), Al2O3(s) and MgO(s), are in the range 85° to 88°. The reaction zone is composed of forsterite (2MgO·SiO2) and clinoenstatite (2MgO·2SiO2) on the MgO(s)-side of the interface between the Si and MgO. The contact angle between molten silicon and Si3N4 is about 90°. Molten silicon spreads over the SiC plate and the contact angle is estimated to be 8°. Large contact-angle values (around 145°) have been observed on BN substrates. At the interface between Si(l) and the BN substrate, a discontinuous Si3N4 layer is believed to form and might retard the dissolution of BN into molten silicon. The BN substrate is regarded as being the most suitable substrate for supporting a molten silicon drop during surface tension measurements, due to the large contact angle and low contamination.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. V. Laurent, D. Chatain, N. Eustathopoulos: Mater. Sci. Eng. A 135, 89 (1991)

    Article  Google Scholar 

  2. H.N. Ho, S.T. Wu: Mater. Sci. Eng. A 248, 120 (1998)

    Article  Google Scholar 

  3. K. Nogi: ‘Measurements of Thermophysical Properties of Semiconductors’. In: Outline of the Research and Development Results, JSUP 1997 (Tokyo 1997) p. 119

  4. Z. Liu, T. Carlberg: J. Mater. Res. 7, 352 (1992)

    Google Scholar 

  5. H. Fujii, T. Matsumoto, K. Nogi: Acta Mater. 48, 2933 (2000)

    Article  Google Scholar 

  6. M. Humenik Jr., W.D. Kingery: J. Am. Ceram. Soc. 37, 18 (1954)

    Google Scholar 

  7. K. Mukai, Z. Yuan: Mater. Trans. JIM 41, 323 (2000)

    Google Scholar 

  8. K. Mukai, Z. Yuan: Mater. Trans. JIM 41, 331 (2000)

    Google Scholar 

  9. Y. Rotenberg, L. Boruvka, A.W. Neumann: J. Coll. Int. Sci. 93, 169 (1983)

    Google Scholar 

  10. N. Shinozaki, M. Sonoda, K. Mukai: Metal. Mater. Trans. 29A, 1121 (1998)

    Google Scholar 

  11. K. Mukai, T. Sako, Z. Yuan: Mater. Trans. JIM 41, 639 (2000)

    Google Scholar 

  12. U. Ekhult, T. Carlberg: J. Electrochem. Soc. 136, 551 (1989)

    Google Scholar 

  13. Z. Liu, T. Carlberg: J. Electrochem. Soc. 139, 844 (1992)

    Google Scholar 

  14. U. Ekhult, T. Carlberg: J. Electrochem. Soc. 136, 3809 (1989)

    Google Scholar 

  15. T. Narushima, K. Matsuzawa, Y. Mukai, Y. Iguchi: Mater. Trans. JIM 35, 522 (1994)

    Google Scholar 

  16. K. Mukai: The Way to Use Chemical Thermodynamics (Kyoritsu Press, Tokyo, Japan 1993) p.  149

  17. T. Narushima, N. Ueda, M. Takeuchi, F. Ishii, Y. Iguchi: Mater. Trans. JIM 35, 821 (1994)

    Google Scholar 

  18. K. Nogi, K. Ikeda, S. Shimada, K. Ogino: J. Jpn. Inst. Metals 52, 663 (1988)

    Google Scholar 

  19. K. Nogi, K. Ogino: Trans. Jpn. Inst. Metals 29, 742 (1988)

    Google Scholar 

  20. M.W. Chase: ‘JANAF Thermochemical Tables’, 3rd edn. In: J. Phys. Ref. Data 14, 177 (1985)

    Google Scholar 

  21. Z.F. Yuan, K. Mukai, W.L. Huang: Langmuir 18, 2054 (2002)

    Article  Google Scholar 

  22. R. Noguchi, K. Suzuki, F. Tsukihashi, N. Sano: Metal. Mater. Trans. 25B, 903 (1994)

    Google Scholar 

  23. S. Hardy: J. Cryst. Growth 69, 456 (1984)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Z. Yuan.

Additional information

PACS

68.08.Bc; 06.30.Bp; 73.40.Ns; 61.72.Tt

Rights and permissions

Reprints and permissions

About this article

Cite this article

Yuan, Z., Huang, W. & Mukai, K. Wettability and reactivity of molten silicon with various substrates. Appl Phys A 78, 617–622 (2004). https://doi.org/10.1007/s00339-002-2001-8

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-002-2001-8

Keywords

Navigation