Skip to main content
SpringerLink
Log in

Excimer laser polymer ablation: twenty years on

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract.

Research and development in excimer laser polymer ablation has been actively pursued for some twenty years, driven by interest in the basic science as well as by numerous applications that have emerged for this high-resolution technique for material removal. This paper reviews some of the basic mechanistic aspects of the UV laser–polymer interaction as a prelude to dealing with practical matters related to polymer processing by ablation. Applications in micro-machining and potential areas for future research are briefly covered.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

Author information

Authors and Affiliations

  1. Department of Physics, University of Hull, Hull, HU6 7RX, UK, , , , , , UK

    P.E. Dyer

Authors
  1. P.E. Dyer
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Received: 7 October 2002 / Accepted: 8 February 2003 / Published online: 28 May 2003

RID="*"

ID="*"Corresponding author. Fax: +44-1482/465-606, E-mail: p.e.dyer@hull.ac.uk

Rights and permissions

Reprints and permissions

About this article

Cite this article

Dyer, P. Excimer laser polymer ablation: twenty years on . Appl Phys A 77, 167–173 (2003). https://doi.org/10.1007/s00339-003-2137-1

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-003-2137-1

Search

Navigation