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Transient pressure induced by laser ablation of toluene, a highly laser-absorbing liquid

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Abstract

Transient processes of laser ablation of a highly laser-absorbing liquid, toluene, were investigated by directly measuring (by using a fast-response pressure gauge) the transient pressure caused by toluene ablation under KrF laser irradiation . The results were compared with time-resolved images . The peak pressure P due to a shock wave decreased slowly with increasing distance d for d=100–1000 μm:P∝d-0.33. By extrapolating P to d=8.9 μm, the optical penetration depth of toluene at λ=248 nm, the estimated initial pressure due to toluene ablation was 65 MPa at 1.0 J cm-2 pulse-1. The estimated initial pressure increased linearly with the fluence. These results help clarify the mechanism of laser-induced backside wet etching.

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Authors and Affiliations

  1. Photoreaction Control Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki, 305-8565, Japan

    Y. Kawaguchi, X. Ding, A. Narazaki, T. Sato & H. Niino

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  1. Y. Kawaguchi
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  2. X. Ding
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  3. A. Narazaki
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  4. T. Sato
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  5. H. Niino
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Correspondence to Y. Kawaguchi.

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PACS

79.20.Ds; 47.40.Nm; 47.55.Bx; 81.65.Cf

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Kawaguchi, Y., Ding, X., Narazaki, A. et al. Transient pressure induced by laser ablation of toluene, a highly laser-absorbing liquid. Appl. Phys. A 80, 275–281 (2005). https://doi.org/10.1007/s00339-003-2347-6

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  • DOI: https://doi.org/10.1007/s00339-003-2347-6

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