Skip to main content
SpringerLink
Log in

Transmission and scanning electron microscopy studies of single femtosecond- laser-pulse ablation of silicon

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract.

The final state of the material resulting from laser irradiation of silicon using 130 fs pulses at 790 nm was studied using a number of techniques including scanning and transmission electron microscopies, as well as atomic force microscopy. Structural details and the level of damage to the nearby solid following irradiation were characterized and are discussed in the context of recent dynamical studies.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

Author information

Authors and Affiliations

  1. Brockhouse Institute for Materials Research, McMaster University, Hamilton, Ontario, L8S 4M1, Canada, , , , , , CA

    A. Borowiec, M. MacKenzie, G.C. Weatherly & H.K. Haugen

Authors
  1. A. Borowiec
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. MacKenzie
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. G.C. Weatherly
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. H.K. Haugen
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Received: 28 September 2001 / Accepted: 3 March 2002 / Published online: 19 July 2002

RID="*"

ID="*"Department of Engineering Physics, McMaster University, Hamilton, Ontario, L8S 4M1, Canada

RID="**"

ID="**"Corresponding author. Fax: +1-905/521-2773, E-mail: borowia@mcmaster.ca

RID="***"

ID="***"Present address: Department of Physics and Astronomy, University of Glasgow, Glasgow, G12 8QQ, UK

RID="****"

ID="****"Department of Materials Science and the CEMD, McMaster University, Hamilton, Ontario, L8S 4M1, Canada

RID="*****"

ID="*****"Departments of Engineering Physics, and Physics and Astronomy, and the CEMD, McMaster University, Hamilton, Ontario, L8S 4M1, Canada

Rights and permissions

Reprints and permissions

About this article

Cite this article

Borowiec, A., MacKenzie, M., Weatherly, G. et al. Transmission and scanning electron microscopy studies of single femtosecond- laser-pulse ablation of silicon . Appl Phys A 76, 201–207 (2003). https://doi.org/10.1007/s003390201409

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/s003390201409

Search

Navigation