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Observation and spatial distribution of C3 in a DC arcjet plasma during diamond deposition using laser-induced fluorescence

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radical in the plume of an arcjet plasma during diamond film chemical vapor deposition. C3, identified using laser-induced fluorescence, is distributed in a shell surrounding the diamond-depositing core of the arcjet plasma plume.

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Authors and Affiliations

  1. Department of Chemistry, Hamilton College, Clinton NY 13323 USA, , , , , , US

    G.A. Raiche

  2. Molecular Physics Laboratory, SRI International, Menlo Park CA 94025 USA, , , , , , US

    J.B. Jeffries

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  1. G.A. Raiche
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  2. J.B. Jeffries
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Received: 13 June 1996/Revised version: 5 September 1996

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Raiche, G., Jeffries, J. Observation and spatial distribution of C3 in a DC arcjet plasma during diamond deposition using laser-induced fluorescence . Appl Phys B 64, 593–597 (1997). https://doi.org/10.1007/s003400050220

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  • DOI: https://doi.org/10.1007/s003400050220

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