Skip to main content

Advertisement

SpringerLink
Log in

Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications

  • Technical paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

This paper presents a silicon microgenerator, fabricated using standard silicon micromachining techniques, which converts external ambient vibrations into electrical energy. Power is generated by an electromagnetic transduction mechanism with static magnets positioned on either side of a moving coil, which is located on a silicon structure designed to resonate laterally in the plane of the chip. The volume of this device is approximately 100 mm3. ANSYS finite element analysis (FEA) has been used to determine the optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft’s Maxwell 3D software have been performed to determine the voltage generated from a single beam generator design. The predicted voltage levels of 0.7–4.15 V can be generated for a two-pole arrangement by tuning the damping factor to achieve maximum displacement for a given input excitation. Experimental results from the microgenerator demonstrate a maximum power output of 104 nW for 0.4g (g=9.81 m s−1) input acceleration at 1.615 kHz. Other frequencies can be achieved by employing different geometries or materials.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12

Similar content being viewed by others

References

  1. Najafi K (2000) Low-power micromachined Microsystems. In: IEEE proceedings. 1st International symposium on low power electronics and design, pp 1–8

  2. Shearwood C, Yates RB (1997) Development of an electromagnetic micro-generator. Electron Lett 33(22):1883–1884

    Article  Google Scholar 

  3. Ching NNH, Wong HY, Li WJ, Leong PHW, Wen Z (2002) A laser-micromachined multi-modal resonating power transducer for wireless sensing systems. Sens Actuators A Phys 97–98:685–690

    Article  Google Scholar 

  4. El-Hami M, Glynne-Jones P, James E, Beeby SP, White NM, Brown AD, Ross JN, Hill M (2001) Design and fabrication of a new vibration-based electromechanical power generator. Sens Actuators A Phys 92:335–342

    Article  Google Scholar 

  5. Mitcheson PD, Green TC, Yeatman EM, Holmes AS (2004) Architectures for vibration-driven micropower generators. J MEMS 13(3):429–440

    Google Scholar 

  6. Glynne-Jones P, Tudor MJ, Beeby SP, White NM (2004) An electromagnetic, vibration-powered generator for intelligent sensor systems. Sens Actuators A Phys 110(1–3):344–349

    Article  Google Scholar 

Download references

Acknowledgements

The authors would like to acknowledge the European Union for funding this Framework 6 STREP project VIBES, project reference 507911.

Author information

Authors and Affiliations

  1. School of Electronics and Computer Science, University of Southampton, SO17 1BJ, Southampton, UK

    E. Koukharenko, S. P. Beeby, M. J. Tudor & N. M. White

  2. Tyndall National Institute, Prospect Row, Cork, Ireland

    T. O’Donnell, C. Saha, S. Kulkarni & S. Roy

Authors
  1. E. Koukharenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. S. P. Beeby
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. J. Tudor
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. N. M. White
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. T. O’Donnell
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. C. Saha
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. S. Kulkarni
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. S. Roy
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to E. Koukharenko.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Koukharenko, E., Beeby, S.P., Tudor, M.J. et al. Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications. Microsyst Technol 12, 1071–1077 (2006). https://doi.org/10.1007/s00542-006-0137-8

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-006-0137-8

Keywords

Search

Navigation