Abstract
In this paper, a novel method has been developed to control the pull-in voltage of the fixed-fixed and cantilever MEM actuators and measure the residual stress in the fixed-fixed model using of the piezoelectric layers that have been located on the upper and lower surfaces of actuator. In the developed model, the tensile or compressive residual stresses, fringing-field and axial stress effects in the fixed-fixed end type micro-electro-mechanical systems actuator have been considered. The non-linear governing differential equations of the MEM actuators have been derived by considering the piezoelectric layers and mentioned effects. The results show that due to different applied voltage to the piezoelectric layers, the pull-in voltage can be controlled and in the fixed-fixed type the unknown value of the residual stress can be obtained.
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Rezazadeh, G., Tahmasebi, A. & Zubstov, M. Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage. Microsyst Technol 12, 1163–1170 (2006). https://doi.org/10.1007/s00542-006-0245-5
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DOI: https://doi.org/10.1007/s00542-006-0245-5