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Design and characterization of a humidity sensor realized in LTCC-technology

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Abstract

A new type of integrated temperature and humidity sensor applying Low Temperature Cofired Ceramics technology (LTCC) has been developed and characterized. The proposed device is based on the detection of the difference of thermal conductivity between water vapor and dry air. In this approach, sensing elements are implemented using heated metal film resistors (Pt-elements), where one is exposed to the humid environment that causes the sensor element to cool down with increased humidity, while the other one is sealed from the environment. LTCC-tapes are used for the formation of caps as well are acting as substrate. Sensor design is based on finite element analyses (FEA) where the critical design parameters have been analyzed with regard to the performance characteristic of the device.

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Acknowledgments

This work has been integrated within EU 4M Project (Contract Number NMP2-CT-2004-500274).

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Authors and Affiliations

  1. Institute of Sensor and Actuator Systems/AEM-Group, Vienna University of Technology, Vienna, Austria

    W. Smetana & M. Unger

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  1. W. Smetana
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  2. M. Unger
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Correspondence to W. Smetana.

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Smetana, W., Unger, M. Design and characterization of a humidity sensor realized in LTCC-technology. Microsyst Technol 14, 979–987 (2008). https://doi.org/10.1007/s00542-007-0465-3

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  • DOI: https://doi.org/10.1007/s00542-007-0465-3

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