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Why you will use the deep X-ray LIG(A) technology to produce MEMS?

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Abstract

Geometrical and dimensional tolerances, obtainable precisions, accuracy, surface quality and roughness need to be controlled in order to realise effective processes and to achieve a real improvement in micromanufacturing technologies. For the fabrication of highly precise mm parts, different processes can be chosen. The LIGA technique, a German acronym consisting of the letters LI (Röntgen Lithographie meaning X-ray lithography), G (Galvanik meaning electroforming) and A (Abformung meaning molding) developed at the Research Center Karlsruhe, offers the possibility to manufacture microstructures with a number of unique features. With these properties, LIGA is on the leading edge of microfabrication. This is a well known issue to most participants in the micro sector. However, most actors consider LIGA to be very expensive, to take much time from design up to realization, and to impose a number of quality problems. In this paper, we try to modify the perception of the LIGA process by addressing some quality properties of the process by taking two different examples and we address the throughput and cost situation by establishing a mass fabrication line for direct LIGA products at ANKA.

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Authors and Affiliations

  1. Institut für Mikrostrukturtechnik, Universität Karlsruhe, 76021, Karlsruhe, Germany

    Pascal Meyer & Volker Saile

  2. Institut für Mikrostrukturtechnik, Forschungszentrum Karlsruhe, 76021, Karlsruhe, Germany

    Joachim Schulz, Lothar Hahn & Volker Saile

Authors
  1. Pascal Meyer
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  2. Joachim Schulz
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  3. Lothar Hahn
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  4. Volker Saile
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Correspondence to Pascal Meyer.

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Meyer, P., Schulz, J., Hahn, L. et al. Why you will use the deep X-ray LIG(A) technology to produce MEMS?. Microsyst Technol 14, 1491–1497 (2008). https://doi.org/10.1007/s00542-007-0503-1

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  • DOI: https://doi.org/10.1007/s00542-007-0503-1

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