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First automated production line for X-ray-LIGA (FELIG) is brought on line

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Abstract

The project FELIG sets a milestone in X-ray-LIGA technology. The first automated LIGA production is brought online. The units have been implemented at the synchrotron source ANKA at Forschunszentrum Karlsruhe. They are linked via a conveyor line and controlled by a superior software system. Other process steps as resist technique have been partly automated. The whole process has been adapted to a wafer format of 6″. Automation and enlargement of formats will reduce production costs for LIGA components and help LIGA technique for industrial breakthrough.

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Acknowledgment

The authors acknowledge the financial support by the German Federal Ministry of Education and Research in Germany.

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Authors and Affiliations

  1. Institut für Mikrostrukturtechnik, Karlsruher Institut für Technologie (KIT), Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany

    Lothar Hahn, Volker Saile & Joachim Schulz

  2. Institut für Angewandte Informatik/Automatisierungstechnik, Karlsruher Institut für Technologie (KIT), Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany

    Georg Schwartz

Authors
  1. Lothar Hahn
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  2. Georg Schwartz
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  3. Volker Saile
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  4. Joachim Schulz
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Correspondence to Lothar Hahn.

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Hahn, L., Schwartz, G., Saile, V. et al. First automated production line for X-ray-LIGA (FELIG) is brought on line. Microsyst Technol 16, 1287–1292 (2010). https://doi.org/10.1007/s00542-009-0953-8

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  • DOI: https://doi.org/10.1007/s00542-009-0953-8

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