Skip to main content
SpringerLink
Log in

A polymer-based bidirectional micropump driven by a PZT bimorph

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

This paper presents a polymer-based micropump for liquid control or drug delivery. The dimension of the pump was 20 × 24 × 3 mm3. A pair of O-ring SU-8 passive valves was fabricated by lift-off technique to control the fluid movement. Micropumps with dimple, bridge, and cantilever valves were studied. The PZT bimorph acted on the polymer membrane to periodically drive fluid. The maximum flow rate was 16.4 ml/min, and the back pressure was 1,525 mmH2O at 150 V (Vp-p). In frequency sweeping experiments, two flow rate peaks and back pressure peaks were analyzed. Bidirectional flow rate was achieved by changing the valve seat from a one-size hole to a step hole. The maximum backward flow rate was 5.1 ml/min, and the driving frequency was about 355 Hz higher than the forward flow rate driving frequency.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8

Similar content being viewed by others

References

  • Bohm S, Olthuis W, Bergveld P (1999) A plastic micropump constructed with conventional techniques and materials. Sens Actuat A 77:223–228

    Article  Google Scholar 

  • Chen L, Lee S, Choo J, Lee EK (2008) Continuous dynamic flow micropump for microfluid manipulation. J Micromech Microeng 18:013001 (22 pp)

    Article  Google Scholar 

  • Cooney CG, Towe BC (2004) A thermopneumatic dispensing micropump. Sens Actuat A 116:519–524

    Article  Google Scholar 

  • Doll AF, Wischke M, Geipel A, Goldschmidtboeing F, Ruthmann O, Hopt UT, Schrag HJ, Woias P (2007) A novel artificial sphincter prosthesis driven by a four-membrane silicon micropump. Sens Actuat A 139:203–209

    Article  Google Scholar 

  • Gietzelt T, Piotter V, Reprecht R, Hausselt J (2002) Manufacturing of isolated ceramic microstructures. Microsyst Technol 9:99–103

    Article  Google Scholar 

  • Han A, Wang O, Graff M, Mohanty SK, Edwards TL, Han KH, Bruno F (2003) A multi-layer plastic/glass microfluidic systems containing electrical and mechanical functionality. Lab chip 3:150–157

    Article  Google Scholar 

  • Hwang IH, An JY, Ko KH, Shin SM, Lee JH (2007) A novel micropump with fixed-geometry valves and low leakage flow. J Micromech Microeng 17:1632–1639

    Article  Google Scholar 

  • Kamper KP, Dopper J, Ehrfeld W, Oberbeck S (1998) A self-filling low-cost membrane micropump, In: Proc. IEEE MEMS’98, Heidelberg, Germany (25–29 January, 1998), pp 432–437

  • Koch M, Harris N, Maas R, Evans AGR, White WM, Brunnschweiler A (1997) A novel micropump design with thick-film piezoelectric actuation. Meas Sci Technol 8:49–57

    Article  Google Scholar 

  • Lee S, Kim KJ (2006) Design of IPMC actuator-driven valve-less micropump and its flow rate estimation at low reynolds numbers. Smart Mater Struct 15:1103–1109

    Article  Google Scholar 

  • Lee CY, Chang HT, Wen CY (2008) A MEMS-based valveless impedance pump utilizing electromagnetic actuation. J Micromech Microeng 18:035044 (9 pp)

    Article  Google Scholar 

  • Nisar A, Afzulpurkar N, Mahaisavariya B, Tuantranont A (2008) MEMS-based micropumps in drug delivery and biomedical applications. Sens Actuat B 130:917–942

    Article  Google Scholar 

  • Shen M, Yamahata C, Gijs MAM (2008) Miniaturized PMMA ball-valve micropump with cylindrical electromagnetic actuator. Microelectron Eng 85:1104–1107

    Article  Google Scholar 

  • Truong TQ, Nguyen NT (2004) A polymeric piezoelectric micropump based on lamination technology. J Micromech Microeng 14:632–638

    Article  Google Scholar 

  • Wego A, Pagel L (2001) A self-filling micropump based on PCB technology. Sens Actuat A 88:220–226

    Article  Google Scholar 

  • Yoon JS, Choi JW, Lee IH, Kim MS (2007) A valveless micropump for bidirectional applications. Sens Actuat A 135:833–838

    Article  Google Scholar 

  • Zengerle R, Ulrich J, Kluge S, Richter M, Richter A (1995) A bidirectional silicon micropump. Sens Actuat A 50:81–86

    Article  Google Scholar 

Download references

Acknowledgments

This work was partially supported by National Institute of Health (NIH-NIDDK SBIR Phase I Grant R43 DK076320-01A1). The authors also acknowledge the fabrication and characterization assistance at the Nanofabrication Center and the Characterization Facility at the University of Minnesota.

Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, University of Minnesota, 111 Church Street S. E., Minneapolis, MN, 55455, USA

    Yi Luo, Miao Lu & Tianhong Cui

Authors
  1. Yi Luo
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Miao Lu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Tianhong Cui
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Tianhong Cui.

Additional information

Y. Luo and M. Lu contributed equally to this work.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Luo, Y., Lu, M. & Cui, T. A polymer-based bidirectional micropump driven by a PZT bimorph. Microsyst Technol 17, 403–409 (2011). https://doi.org/10.1007/s00542-010-1199-1

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-010-1199-1

Keywords

Search

Navigation