Abstract
In this paper design modifications are proposed in microgripper design using two in-plane chevron electrothermal actuators. The design modifications are, converting free–free gripping arm into a clamped-free gripping arm and inclusion of the heat sinks in the shuttle. The modified design provides reduced temperature at the gripping jaws and higher gripping force. The proposed microgripper is modelled analytically and numerically using MEMS CAD tool CoventorWare. The performance of the microgripper such as displacement, force and temperature for the voltage range of 0–1.2 V is evaluated through numerical and analytical simulation. The results demonstrate the feasibility of fabrication. Further the gripper is made of polysilicon which allows operating the gripper at lower voltage.
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Shivhare, P., Uma, G. & Umapathy, M. Design enhancement of a chevron electrothermally actuated microgripper for improved gripping performance. Microsyst Technol 22, 2623–2631 (2016). https://doi.org/10.1007/s00542-015-2561-0
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DOI: https://doi.org/10.1007/s00542-015-2561-0