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Research development of silicon MEMS gyroscopes: a review

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Abstract

Micro-electromechenical Systems (MEMS) gyroscope is widely used in many occasions to measure the angular speed of the moving objects and attracts the attentions of many research institutions all over the world. This kind of sensor possesses the advantages of high degree of integration, low cost and consumption of power. This paper first introduces the research development of silicon MEMS gyroscope since eighties of last century; the researches of many institutions such as Draper Laboratory and UC Berkeley are mentioned and different design principles, control methods and structures are presented. This review then presents the key theories and technologies of the sensor and some research results of them. In additional, some recent new applications of MEMS gyroscope are also been introduced in this paper such as wearable motion capture system and micro inertial measurement unit. Finally, according to the review, some views of silicon MEMS gyroscope and its future prospects are put forwarded.

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Acknowledgments

This paper is supported by the International cooperation project with Grant number 2014DFA31230.

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Authors and Affiliations

  1. School of Instrument Science and Opto-electronics Engineering, Beihang University, Beijing, 100191, China

    Guo Zhanshe, Cheng Fucheng, Li Boyu, Cao Le, Lu Chao & Song Ke

  2. State Key Laboratory of Virtual Reality Technology and Systems, Beihang University, Beijing, 100191, China

    Guo Zhanshe, Cheng Fucheng, Li Boyu, Cao Le, Lu Chao & Song Ke

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  1. Guo Zhanshe
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Correspondence to Cheng Fucheng.

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Zhanshe, G., Fucheng, C., Boyu, L. et al. Research development of silicon MEMS gyroscopes: a review. Microsyst Technol 21, 2053–2066 (2015). https://doi.org/10.1007/s00542-015-2645-x

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