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Projection-type moiré topography with frequency modulation technique using liquid crystal digital gratings

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Abstract

A projection-type moiré topography that uses a frequency modulation technique with two liquid crystal digital gratings (LCDGs) is proposed. In this method, moiré contours are filtered to remove the image of the original grating from the moiré contours by moving the image created by the LCDGs. The frequency modulation technique can be used to analyze the fringe of step heights or other separate areas by modulating the fringe interval. The experimental results showed the possibility of measuring three-dimensional shapes and step heights.

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Correspondence to Fumio Kobayashi.

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Kobayashi, F., Otani, Y. & Yoshizawa, T. Projection-type moiré topography with frequency modulation technique using liquid crystal digital gratings. OPT REV 19, 154–158 (2012). https://doi.org/10.1007/s10043-012-0026-6

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  • DOI: https://doi.org/10.1007/s10043-012-0026-6

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