Abstract
Wavelength-tuning Fizeau interferometry has been widely used to measure and estimate the optical thickness of optical components. However, in multilayer interferometry, the coupling errors between the higher harmonics and phase-shift error cause systematic errors in the calculated phase distribution. This paper presents the derivation of a 15-sample phase-shifting algorithm that can compensate for the phase-shift miscalibration and up-to-first-order nonlinearity of the coupling errors between the second-order harmonic and phase-shift error. The characteristics of the 15-sample algorithm are estimated with respect to the Fourier representation in the frequency domain. The optical thickness of a highly reflective lithium niobate crystal wafer is measured using a wavelength-tuning Fizeau interferometer and 15-sample algorithm. Finally, the optical thickness is determined from the measured data using the statistical Student’s t test.
Similar content being viewed by others
Change history
12 December 2018
In the original publication Acknowledgements was not included. The Acknowledgements is given in this correction.
References
de Groot, P., Deck, L.: Surface profiling by analysis of white-light interferograms in the spatial frequency domain. J. Mod. Opt. 42, 389–401 (1995)
Fukano, T., Yamaguchi, I.: Simultaneous measurement of thickness and refractive indices of multiple layers by a low-coherence confocal interference microscope. Opt. Lett. 21, 1942–1944 (1996)
Haruna, M., Ohmi, M., Mitsuyama, T., Tajiri, H., Maruyama, H., Hashimoto, M.: Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry. Opt. Lett. 23, 966–968 (1998)
de Groot, P.: Measurement of transparent plates with wavelength-tuned phase shifting interferometry. Appl. Opt. 39, 2658–2663 (2000)
Coppola, G., Ferraro, P., Iodice, M., De Nicola, S.: Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer. Appl. Opt. 42, 3882–3887 (2003)
Hibino, K., Oreb, B.F., Fairman, P.S., Burke, J.: Simultaneous measurement of surface shape and variation in optical thickness of a transparent parallel plate in wavelength-scanning Fizeau interferometer. Appl. Opt. 43, 1241–1249 (2004)
Hibino, K., Kim, Y., Lee, S., Kondo, Y., Sugita, N., Mitsuishi, M.: Simultaneous measurement of surface shape and absolute optical thickness of a glass plate by wavelength tuning phase-shifting interferometry. Opt. Rev. 19, 247–253 (2012)
Creath, K.: Phase-measurement interferometry techniques. Progress Opt. 26, 349–393 (1988)
Hariharan, P.: Digital phase-stepping interferometry: effects of multiply reflected beams. Appl. Opt. 26, 2506–2507 (1987)
Hibino, K., Oreb, B.F., Farrant, D.I., Larkin, K.G.: Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts. J. Opt. Soc. Am. A 14, 918–930 (1997)
de Groot, P.: Correlated errors in phase-shifting laser Fizeau interferometry. Appl. Opt. 53, 4334–4342 (2014)
Kim, Y., Hibino, K., Sugita, N., Mitsuishi, M.: Simultaneous measurement of surface shape and optical thickness using wavelength tuning and a polynomial window function. Opt. Express 23, 32869–32880 (2015)
Surrel, Y.: Design of phase-detection algorithms for phase measurements by the use of phase stepping. Appl. Opt. 35, 51–60 (1996)
Liu, K., Littman, M.G.: Novel geometry for single-mode scanning of tunable lasers. Opt. Lett. 6, 117–118 (1981)
Larkin, K.G., Oreb, B.F.: Design and assessment of symmetrical phase-shifting algorithms. J. Opt. Soc. Am. A 9, 1740–1748 (1992)
Schwider, J., Falkenstörfer, O., Schreiber, H., Zöller, A., Streibl, N.: New compensating four-phase algorithm for phase-shift interferometry. Opt. Eng. 32, 1883–1885 (1993)
Schmit, J., Creath, K.: Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry. Appl. Opt. 34, 3610–3619 (1995)
Hibino, K., Oreb, B.F., Farrant, D.I., Larkin, K.G.: Phase-shifting for nonsinusoidal waveforms with phase-shift errors. J. Opt. Soc. Am. A 12, 761–768 (1995)
Kim, Y., Hibino, K., Sugita, N., Mitsuishi, M.: Design of phase shifting algorithms: fringe contrast maximum. Opt. Express 22, 18203–18213 (2014)
Bruning, J.H., Herriott, D.R., Gallagher, J.E., Rosenfeld, D.P., White, A.D., Brangaccio, D.J.: Digital wavefront measuring interferometer for testing optical surfaces and lenses. Appl. Opt. 13, 2693–2703 (1974)
Surrel, Y.: Phase stepping: a new self-calibrating algorithm. Appl. Opt. 32, 3598–3600 (1993)
Freischlad, K., Koliopoulos, C.: Fourier description of digital phase-measuring interferometry. J. Opt. Soc. Am. A 7, 542–551 (1990)
Figliola, R.S., Beasley, D.E.: Theory and Design for Mechanical Measurements. Wiley, New York (2015), pp. 123–167
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Kim, Y., Hibino, K. Statistical and interferometric determination of the optical thickness of a multilayer transparent plate. Opt Rev 24, 734–740 (2017). https://doi.org/10.1007/s10043-017-0371-6
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10043-017-0371-6